Sensors & Feedthroughs

UHV Bakeable Sensor

UHV-Bakeable-Sensor

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON UHV Bakeable Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 Stainless Steel, Molybdenum, Inconel, Nickel, and Alumina materials, the UHV Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450° C (for bakeout only, water flow required for actual deposition monitoring). The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion.

Features

  • High temperature braze & welded construction
  • Bakeout temperatures to 450° C
  • Crystal shutter (option)
  • Front load crystal holder
  • Easy installation
  • CF40 feedthrough
  • No brazing or welding to feedthrough required
  • Sensor/feedthrough combination welded to customer specified lengths

Specifications

Bakeable Sensor w/ Shutter
Bakeable Sensor w/out Shutter
Maximum temperature400° C continuous (for bake only; water flow recommended for actual deposition monitoring)
Crystal exchangeFront loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange.
Water, air and coax lines0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
Maximum temperature450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
Crystal exchangeFront loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
Water, air and coax lines0.125 in. (3 mm) O.D. water x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
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Accessories

Accessories
Consumables
Part NumberDescription
750-420-G1Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors)
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals

Spare Parts

Part NumberDescription
007-007Retainer spring (for crystal holder)
007-064Ceramic retainer
007-094Clamping spring
007-095Handle
007-098Female Connector (includes ferrules and nut)
007-099Bakeable head contact
007-100Insulator for BNC
007-103Insulator for bakeable head contact
007-104BNC Body
007-147#4-40 X 3/8 screw
007-155Braze assy - 12 in. (30.5 cm)
007-156Braze assy - 20 in (50.8 cm)
007-157Braze assy - 30 in. (76.2 cm)
007-228#4-40 X 5/8 screw
007-267-P2Spreader bar
007-268-P1Shoulder washer
007-269-P1Shoulder washer
008-007CRYSTAL SNATCHER
059-0084VCR gasket
070-201#4 Split lockwasher
084-069-P1#4-40 x 3/16 screw
750-018-P3Split clamp
750-018-P5Split clamp
750-022-G5Bellows assembly - 12 in. (30.5 cm)
750-022-G6Bellows assembly - 20 in. (50.8 cm)
750-022-G7Bellows assembly - 30 in. (76.2 cm)
750-028-G5Braze assy with air line - 12 in. (30.5 cm)
750-028-G6Braze assy with air line - 20 in. (50.8 cm)
750-028-G7Braze assy with air line - 30 in. (76.2 cm)
750-115-P4Coupling (installs onto bellows assembly)
750-118-P4Actuator support
750-120-G3Shaft assembly
750-216-G1Shutter assembly (part of shutter module)
750-218-G1Cyrstal holder
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