INFICON’s Edge-Based Computing FabGuard Facilities Monitoring System and integrated HMI provides integration of facilities and subfab components with process information. Working alongside with data collected from the process equipment, INFICON makes it possible to manage and control multiple subfab/facilities components with regard to their impact on processes.
Smart control/Energy savings: Reduced energy usage by linking tool states to facilities
Migrate to condition-based consumption: Reduced use of consumables/chemicals/gases (reduction of 15-35% typical)
Regulatory compliance and reporting: Lower CO, CO2, NOx etc. emissions, cumulative consumption reporting to agencies
Increase FDC tool Digital Twin fidelity: Increased awareness by adding facility/subfab data to process data
Smart and Predictive maintenance scheduling: Use data to create predictive maintenance routines