Process Control

Subfab and Facilities Monitoring

Smart Subfab Control for Greener Factories

Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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Apply Sensing technologies - Connecting critical systems - Predicting real time issues

Bring the Power of Fault Detection and Control to the Subfab

INFICON’s Edge-Based Computing FabGuard Facilities Monitoring System and integrated HMI provides integration of facilities and subfab components with process information. Working alongside with data collected from the process equipment, INFICON makes it possible to manage and control multiple subfab/facilities components with regard to their impact on processes.

Smart control/Energy savings: Reduced energy usage by linking tool states to facilities

Migrate to condition-based consumption: Reduced use of consumables/chemicals/gases (reduction of 15-35% typical)

Regulatory compliance and reporting: Lower CO, CO2, NOx etc. emissions, cumulative consumption reporting to agencies

Increase FDC tool Digital Twin fidelity: Increased awareness by adding facility/subfab data to process data

Smart and Predictive maintenance scheduling: Use data to create predictive maintenance routines

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Connect the Fab with the Subfab

FabGuard is a Smart Tool-based Digital Twin enabling engineers to collect data from a wide range of sensors, gauges, facilities, and other devices to develop the most comprehensive view of process tools in the industry. 

  • Pumps: Drive Current, Temperatures, Pressures, Purge Flows, Vibrational, Alarms
  • Abatement: Gas Consumption, Operational Values, Alarms
  • Exhaust: Differential Pressure, Temperature, Byproduct Deposition
  • Heaters: Heater Current/Voltage, Temperature
  • Chillers: Flow Rates, Temperature
Smart Fault Detection and Classification_Smart Tool Digital Twin
Smart Fault Detection and Classification_Smart Tool Digital Twin

Combining process information with the subfab and facilities data to obtain a clear view of potential process impacts and better methods for control. INFICON uses the Smart Tool-based Digital Twin to predict excursions, manage maintenance activities, and identify opportunities for cost savings.

Lower Costs and Increase Your Green Footprint

While manufacturers strive to minimize idle time, equipment idle periods provide an opportunity to minimize waste resulting in lower costs and a more green operation.

By utilizing real-time WIP Scheduling and equipment state information, FabGuard controls subfab and facilities components to minimize usage of power and consumables. This includes making use of Green operation and Idle modes.

Subfab and Facilities Monitoring_Lower Costs and Increase Your Green Footprint
Subfab and Facilities Monitoring_Lower Costs and Increase Your Green Footprint

Interested in More?

Schedule your demo now