The Spot CDS530D ceramic capacitance diaphragm sensor is designed for integration into the limited space in your specific vacuum instruments and systems.
The dual miniature sensor offers a high accuracy in a wide measurement range, is corrosion resistant as the alumina ceramic cells and a weldable stainless steel feedthrough are all alumina coated. The sensor electronics provides a digital SPI interface for easy integration.
The sensor features a fast data cycle time for instant response to pressure changes, outstanding repeatability and long-term stability.
Miniature Alumina (Al2O3) ceramic coated capacitance diaphragm sensor is highly corrosion resistant with UHP compliant wetted surface
Wide range, high precision
Excellent repeatability and long-term stability
Sensor electronics with SPI interface for easy integration
Welded custom flange for integration of calibrated sensor