Capacitance Manometers
Spot™ CDS530D
Full scale 10 … 1000 Torr / mbar
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The Spot CDS530D ceramic capacitance diaphragm sensor is designed for integration into the limited space in your specific vacuum instruments and systems.
The dual miniature sensor offers a high accuracy in a wide measurement range, is corrosion resistant as the alumina ceramic cells and a weldable stainless steel feedthrough are all alumina coated. The sensor electronics provides a digital SPI interface for easy integration.
The sensor features a fast data cycle time for instant response to pressure changes, outstanding repeatability and long-term stability.
Advantages
- Miniature Alumina (Al2O3) ceramic coated capacitance diaphragm sensor is highly corrosion resistant with UHP compliant wetted surface
- Wide range, high precision
- Excellent repeatability and long-term stability
- Sensor electronics with SPI interface for easy integration
- Welded custom flange for integration of calibrated sensor
- Fast response time
- High overpressure capability
The product is used in the following markets
