Capacitance Manometers

Spot™ CDS500D

Full scale 10 … 1000 Torr / mbar

Spot-CDS500D

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The Spot CDS500D ceramic capacitance diaphragm sensor is designed for integration into the limited space in your specific vacuum instruments and systems. 

The miniature sensor offers a high accuracy, is corrosion resistant as the alumina ceramic cell and a weldable stainless steel feedthrough are all alumina coated. The sensor electronics provides a digital SPI interface for easy integration. 

The sensor features a fast data cycle time for instant response to pressure changes, outstanding repeatability and long-term stability.

Advantages

  • Miniature Alumina (Al2O3) ceramic coated capacitance diaphragm sensor is highly corrosion resistant with UHP compliant wetted surface
  • Excellent repeatability and long-term stability
  • Weldable feedthrough for custom integration and calibration, or welded custom flange for integration of factory calibrated sensor
  • Sensor electronics with SPI interface for easy integration
  • Fast response time
  • High overpressure capability

Typical applications

  • For integration into custom vacuum instrumentation and systems