Pirani Gauges

PSG50x & PSG51x

ATM To Medium Vacuum Gauge

Prices & Availability

Drop-in Options

Revolutionize your vacuum gauge experience with us!

The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in the marketplace.

The rugged stainless steel sensor cell and compact design qualify them for use on semiconductor systems and for standard applications, such as fore vacuum lines.

Advantages

Easy push button ATM and HV adjustment
Space saving rugged design
Aluminum housing
Mounts in any orientation
Stainless steel measuring cell with metal-sealed feedthrough
Logarithmic signal output for easy integration
10 bar absolute overpressure with threaded connections
250 °C bakeable version
Nickel filament option for corrosive applications
Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
Optional setpoints
RoHS compliance

Typical applications

Controlling high vacuum ionization gauges
Fore vacuum pressure monitoring
Safety circuits in vacuum systems
General vacuum measurement and control in the fine and rough vacuum range

Specifications

PSG500 tungsten

PSG500-S tungsten, setpoints

PSG502-S nickel, setpoints

PSG510-S tungsten, setpoints, ceramic feedthroughs

PSG512-S nickel, setpoints, ceramic feedthroughs

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	none
Setting range	mbar	‒
Hysteresis	% of reading	‒
Relay contact		‒
Relay contact: Switching time	ms	‒

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		AI₂O₃, Ni, DIN 1.3981 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		AI₂O₃, Ni, DIN 1.3981 / 1.4305 / 1.4435

Download full specifications

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Datasheets

PSG50x & PSG51x Datasheet

pdf • 2,0 MB • English • Datasheets

PSG50x & PSG51x Datasheet

pdf • 2,1 MB • Korean • Datasheets

PSG50x & PSG51x Datasheet

pdf • 2,0 MB • Spanish • Datasheets

PSG50x & PSG51x Datasheet

pdf • 2,0 MB • German • Datasheets

PSG50x & PSG51x Datasheet

pdf • 2,1 MB • Japanese • Datasheets

PSG50x & PSG51x Datasheet

pdf • 2,1 MB • Chinese • Datasheets

PSG50x & PSG51x Datenblatt

pdf • 367,2 KB • German • Datasheets

PSG50x & PSG51x Ficha técnica

pdf • 362,4 KB • Spanish • Datasheets

PSG50x & PSG51x データシート

pdf • 446,4 KB • Japanese • Datasheets

PSG50x & PSG51x 数据表

pdf • 421,7 KB • Chinese • Datasheets

PSG50x & PSG51x 데이터시트

pdf • 355,0 KB • Korean • Datasheets

Manuals

PSG50x & PSG51x Gebrauchsanleitung

pdf • 274,1 KB • German • Operating Manual

PSG50x & PSG51x Gebrauchsanleitung

pdf • 1,0 MB • German • Operating Manual

PSG50x & PSG51x Installation Manual

pdf • 230,5 KB • French, German, English

PSG50x & PSG51x Operating Manual

pdf • 270,9 KB • English • Operating Manual

PSG50x & PSG51x Operating Manual

pdf • 1.018,1 KB • English • Operating Manual

3D Step Files

PSG500 3D 1/2" Tube

zip • 265,9 KB • 3D Files

PSG500 3D 1/8" NPT

zip • 271,2 KB • 3D Files

PSG500 3D 16CF-R

zip • 284,1 KB • 3D Files

PSG500 3D 16CF-R Long Tube

zip • 295,4 KB • 3D Files

PSG500 3D 16KF

zip • 195,3 KB • 3D Files

PSG500 3D 16KF Long Tube

zip • 281,0 KB • 3D Files

PSG500 3D 4-VCR

zip • 278,4 KB • 3D Files

PSG500 3D 7/16-20 UNF

zip • 277,9 KB • 3D Files

PSG500 3D 8-VCR

zip • 279,6 KB • 3D Files

PSG500 3D G1/8"

stp • 2,2 MB • 3D Files

PSG500-S 3D 1/2" Tube

zip • 337,7 KB • 3D Files

PSG500-S 3D 1/8" NPT

zip • 342,8 KB • 3D Files

PSG500-S 3D 16CF-R

zip • 355,3 KB • 3D Files

PSG500-S 3D 16CF-R Long Tube

zip • 367,1 KB • 3D Files

PSG500-S 3D 16KF

zip • 319,0 KB • 3D Files

PSG500-S 3D 16KF Long Tube

zip • 281,0 KB • 3D Files

PSG500-S 3D 4-VCR

zip • 350,3 KB • 3D Files

PSG500-S 3D 7/16-20 UNF

zip • 349,7 KB • 3D Files

PSG500-S 3D 8-VCR

zip • 351,4 KB • 3D Files

PSG502-S 3D 1/2" Tube

zip • 337,7 KB • 3D Files

PSG502-S 3D 1/8" NPT

zip • 342,8 KB • 3D Files

PSG502-S 3D 16CF-R

zip • 355,3 KB • 3D Files

PSG502-S 3D 16CF-R Long Tube

zip • 367,1 KB • 3D Files

PSG502-S 3D 16KF

zip • 295,4 KB • 3D Files

PSG502-S 3D 16KF Long Tube

zip • 281,0 KB • 3D Files

PSG502-S 3D 4-VCR

zip • 350,3 KB • 3D Files

PSG502-S 3D 7/16-20 UNF

zip • 349,7 KB • 3D Files

PSG502-S 3D 8-VCR

zip • 351,4 KB • 3D Files

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Advantages

Typical applications

Specifications

Order Information

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