Pirani Gauges

PSG50x

ATM To Medium Vacuum Gauge

The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in themarketplace.

The rugged stainless steel sensor cell and compact design qualifythem for use on semiconductor systems and for standard applications, such as fore vacuum lines.

Advantages

Easy push button ATM and HV adjustment
Space saving rugged design
Aluminum housing
Mounts in any orientation
Stainless steel measuring cell with metal-sealed feedthrough
Logarithmic signal output for easy integration
10 bar absolute overpressure with threaded connections
250 °C bakeable version
Nickel filament option for corrosive applications
Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
Optional setpoints
RoHS compliance

Typical applications

Controlling high vacuum ionization gauges
Fore vacuum pressure monitoring
Safety circuits in vacuum systems
General vacuum measurement and control in the fine and rough vacuum range

Specifications

PSG500 tungsten

PSG500-S tungsten, setpoints

PSG502-S nickel, setpoints

PSG510-S tungsten, setpoints, ceramic feedthroughs

PSG512-S nickel, setpoints, ceramic feedthroughs

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	none
Setting range	mbar	‒
Hysteresis	% of reading	‒
Relay contact		‒
Relay contact: Switching time	ms	‒

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		AI₂O₃, Ni, DIN 1.3981 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		AI₂O₃, Ni, DIN 1.3981 / 1.4305 / 1.4435

Download full specifications

Part Number

Accessories

Spare Parts

PSG500 tungsten

350-060	PSG500 DN 16 ISO-KF.
350-061	PSG500 1/8" NPT
350-062	PSG500 DN 16 CF-R
350-063	PSG500 1/2" Tube
350-064	PSG500 8-VCR (1/2")
350-065	PSG500 4-VCR (1/4")
350-066	PSG500 7/16-20 UNF
350-067	PSG500 DN 16 ISO-KF, ext. body
350-068	PSG500 DN 16 CF-R, ext. body

PSG500-S tungsten, setpoints

350-080	PSG500-S DN 16 ISO-KF
350-081	PSG500-S 1/8" NPT
350-082	PSG500-S DN 16 CF-R
350-083	PSG500-S 1/2" Tube
350-084	PSG500-S 8-VCR (1/2")
350-085	PSG500-S 4-VCR (1/4")
350-086	PSG500-S 7/16-20 UNF
350-087	PSG500-S DN 16 ISO-KF, ext. body
350-088	PSG500-S DN 16 CF-R, ext. body

PSG502-S nickel, setpoints

350-140	PSG502-S DN 16 ISO-KF
350-141	PSG502-S 1/8" NPT
350-142	PSG502-S DN 16 CF-R
350-143	PSG502-S 1/2" Tube
350-144	PSG502-S 8-VCR (1/2")
350-145	PSG502-S 4-VCR (1/4")
350-146	PSG502-S 7/16-20 UNF
350-147	PSG502-S DN 16 ISO-KF, ext. body
350-148	PSG502-S DN 16 CF-R, ext. body

PSG510-S tungsten, setpoints, ceramic feedthroughs

350-200	PSG510-S DN 16 ISO-KF

PSG512-S nickel, setpoints, ceramic feedthroughs

350-300	PSG512-S DN 16 ISO-KF

PSG500 tungsten

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG500-S tungsten, setpoints

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG502-S nickel, setpoints

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG510-S tungsten, setpoints, ceramic feedthroughs

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG512-S nickel, setpoints, ceramic feedthroughs

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG500 tungsten

350-920	PSG500 Spare Sensor DN 16 KF
350-921	PSG500 Spare Sensor 1/8" NPT
350-922	PSG500 Spare Sensor DN 16 CF-R
350-923	PSG500 Spare Sensor 1/2" Tube
350-924	PSG500 Spare Sensor 8-VCR (1/2")
350-925	PSG500 Spare Sensor 7/16-20 UNF
350-926	PSG500 Spare Sensor 4-VCR (1/4")
350-927	PSG500 Spare Sensor DN 16 KF,ext.body
350-928	PSG500 Spare Sensor DN 16 CF-R,ext.body

PSG500-S tungsten, setpoints

350-920	PSG500 Spare Sensor DN 16 KF
350-921	PSG500 Spare Sensor 1/8" NPT
350-922	PSG500 Spare Sensor DN 16 CF-R
350-923	PSG500 Spare Sensor 1/2" Tube
350-924	PSG500 Spare Sensor 8-VCR (1/2")
350-925	PSG500 Spare Sensor 7/16-20 UNF
350-926	PSG500 Spare Sensor 4-VCR (1/4")
350-927	PSG500 Spare Sensor DN 16 KF,ext.body
350-928	PSG500 Spare Sensor DN 16 CF-R,ext.body

PSG502-S nickel, setpoints

350-900	PSG502 Spare Sensor DN 16 KF
350-901	PSG502 Spare Sensor 1/8" NPT
350-902	PSG502 Spare Sensor DN 16 CF-R
350-903	PSG502 Spare Sensor 1/2" Tube
350-904	PSG502 Spare Sensor 8-VCR (1/2")
350-905	PSG502 Spare Sensor 7/16-20 UNF
350-906	PSG502 Spare Sensor 4-VCR (1/4")
350-907	PSG502 Spare Sensor DN 16 KF,ext.body
350-908	PSG502 Spare Sensor DN 16 CF-R,ext.body

PSG510-S tungsten, setpoints, ceramic feedthroughs

350-930	PSG510 Spare Sensor DN 16 KF

PSG512-S nickel, setpoints, ceramic feedthroughs

350-940	PSG512 Spare Sensor DN 16 KF

Downloads

Brochures

tibb03e1 Pirani Family Brochure

pdf • 1,6 MB • English

Manuals

TINA44D1_Gebrauchsanleitung_kurz

pdf • 274,1 KB • English

TINA44E1_Operating Manual_short

pdf • 270,9 KB • English

3D Step Files

350-060 PSG500 DN 16 ISO-KF

zip • 195,3 KB • German, Japanese, Korean, Spanish, Chinese, English

350-061 PSG500 1/8" NPT

zip • 271,2 KB • German, Japanese, Korean, Spanish, Chinese, English

350-062 PSG500 DN 16 CF-R

zip • 284,1 KB • German, Japanese, Korean, Spanish, Chinese, English

350-063 PSG500 1/2" tube

zip • 265,9 KB • German, Japanese, Korean, Spanish, Chinese, English

350-064 PSG500 8 VCR®

zip • 279,6 KB • German, Japanese, Korean, Spanish, Chinese, English

350-065 PSG500 4 VCR®

zip • 278,4 KB • German, Japanese, Korean, Spanish, Chinese, English

350-066 PSG500 7/16-20 UNF

zip • 277,9 KB • German, Japanese, Korean, Spanish, Chinese, English

350-067 PSG500 DN 16 ISO-KF long tube

zip • 281,0 KB • German, Japanese, Korean, Spanish, Chinese, English

350-068 PSG500 DN 16 CF-R long tube

zip • 295,4 KB • German, Japanese, Korean, Spanish, Chinese, English

350-072 PSG500 G1/8"

stp • 2,2 MB • German, Japanese, Korean, Spanish, Chinese, English

350-080 PSG500-S DN 16 ISO-KF

zip • 319,0 KB • German, Japanese, Korean, Spanish, Chinese, English

350-081 PSG500-S 1/8" NPT

zip • 342,8 KB • German, Japanese, Korean, Spanish, Chinese, English

350-082 PSG500-S DN 16 CF-R

zip • 355,3 KB • German, Japanese, Korean, Spanish, Chinese, English

350-083 PSG500-S 1/2" tube

zip • 337,7 KB • German, Japanese, Korean, Spanish, Chinese, English

350-084 PSG500-S 8 VCR®

zip • 351,4 KB • German, Japanese, Korean, Spanish, Chinese, English

350-085 PSG500-S 4 VCR®

zip • 350,3 KB • German, Japanese, Korean, Spanish, Chinese, English

350-086 PSG500-S 7/16-20 UNF

zip • 349,7 KB • German, Japanese, Korean, Spanish, Chinese, English

350-087 PSG500-S DN 16 ISO-KF long tube

zip • 281,0 KB • German, Japanese, Korean, Spanish, Chinese, English

350-088 PSG500-S DN 16 CF-R long tube

zip • 367,1 KB • German, Japanese, Korean, Spanish, Chinese, English

350-140 PSG502-S DN 16 ISO-KF

zip • 295,4 KB • German, Japanese, Korean, Spanish, Chinese, English

350-141 PSG502-S 1/8" NPT

zip • 342,8 KB • German, Japanese, Korean, Spanish, Chinese, English

350-142 PSG502-S DN 16 CF-R

zip • 355,3 KB • German, Japanese, Korean, Spanish, Chinese, English

350-143 PSG502-S 1/2" tube

zip • 337,7 KB • German, Japanese, Korean, Spanish, Chinese, English

350-144 PSG502-S 8 VCR®

zip • 351,4 KB • German, Japanese, Korean, Spanish, Chinese, English

350-145 PSG502-S 4 VCR®

zip • 350,3 KB • German, Japanese, Korean, Spanish, Chinese, English

350-146 PSG502-S 7/16-20 UNF

zip • 349,7 KB • German, Japanese, Korean, Spanish, Chinese, English

350-147 PSG502-S DN 16 ISO-KF long tube

zip • 281,0 KB • German, Japanese, Korean, Spanish, Chinese, English

350-148 PSG502-S DN 16 CF-R long tube

zip • 367,1 KB • German, Japanese, Korean, Spanish, Chinese, English

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Advantages

Typical applications

Specifications

Downloads

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