Pirani Gauges
PSG50x & PSG51x
ATM To Medium Vacuum Gauge

Drop-in Options
Revolutionize your vacuum gauge experience with us!
The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in the marketplace.
The rugged stainless steel sensor cell and compact design qualify them for use on semiconductor systems and for standard applications, such as fore vacuum lines.
Advantages
- Easy push button ATM and HV adjustment
- Space saving rugged design
- Aluminum housing
- Mounts in any orientation
- Stainless steel measuring cell with metal-sealed feedthrough
- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
- Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
Specifications
PSG500 tungsten
PSG500-S tungsten, setpoints
PSG502-S nickel, setpoints
PSG510-S tungsten, setpoints, ceramic feedthroughs
PSG512-S nickel, setpoints, ceramic feedthroughs
Measurement range | V | +1.9 … +10.0 |
Accuracy(N2) | ||
1 x 10-3 … 100 mbar | % of reading | ±15% |
5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
100 … 1000 mbar | % of reading | ±50% |
Repeatability (air) | ||
1 x 10-3 … 100 mbar | % of reading | 2% |
Admissible temperature | ||
Operation | °C | +5 … +60 |
Vacuum connection (1) | °C | 80 / 250 (2) |
Storage | °C | -20 … +65 |
Supply voltage | ||
At gauge | V (dc) | +14 …+30 |
Ripple | V (p-p) | ≤1 |
Power consumption | W | ≤1 |
Setpoint | ||
Number of setpoints | Number of setpoints | none |
Setting range | mbar | ‒ |
Hysteresis | % of reading | ‒ |
Relay contact | ‒ | |
Relay contact: Switching time | ms | ‒ |
Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
Measurement range | V | +1.9 … +10.0 |
Accuracy(N2) | ||
1 x 10-3 … 100 mbar | % of reading | ±15% |
5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
100 … 1000 mbar | % of reading | ±50% |
Repeatability (air) | ||
1 x 10-3 … 100 mbar | % of reading | 2% |
Admissible temperature | ||
Operation | °C | +5 … +60 |
Vacuum connection (1) | °C | 80 / 250 (2) |
Storage | °C | -20 … +65 |
Supply voltage | ||
At gauge | V (dc) | +14 …+30 |
Ripple | V (p-p) | ≤1 |
Power consumption | W | ≤1 |
Setpoint | ||
Number of setpoints | Number of setpoints | 2 |
Setting range | mbar | 2 x 10-3 … 500 |
Hysteresis | % of reading | 10% above lower threshold |
Relay contact | 30 | |
Relay contact: Switching time | ms | <20 |
Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
Measurement range | V | +1.9 … +10.0 |
Accuracy(N2) | ||
1 x 10-3 … 100 mbar | % of reading | ±15% |
5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
100 … 1000 mbar | % of reading | ±50% |
Repeatability (air) | ||
1 x 10-3 … 100 mbar | % of reading | 2% |
Admissible temperature | ||
Operation | °C | +5 … +60 |
Vacuum connection (1) | °C | 80 / 250 (2) |
Storage | °C | -20 … +65 |
Supply voltage | ||
At gauge | V (dc) | +14 …+30 |
Ripple | V (p-p) | ≤1 |
Power consumption | W | ≤1 |
Setpoint | ||
Number of setpoints | Number of setpoints | 2 |
Setting range | mbar | 2 x 10-3 … 500 |
Hysteresis | % of reading | 10% above lower threshold |
Relay contact | 30 | |
Relay contact: Switching time | ms | <20 |
Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
Measurement range | V | +1.9 … +10.0 |
Accuracy(N2) | ||
1 x 10-3 … 100 mbar | % of reading | ±15% |
5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
100 … 1000 mbar | % of reading | ±50% |
Repeatability (air) | ||
1 x 10-3 … 100 mbar | % of reading | 2% |
Admissible temperature | ||
Operation | °C | +5 … +60 |
Vacuum connection (1) | °C | 80 / 250 (2) |
Storage | °C | -20 … +65 |
Supply voltage | ||
At gauge | V (dc) | +14 …+30 |
Ripple | V (p-p) | ≤1 |
Power consumption | W | ≤1 |
Setpoint | ||
Number of setpoints | Number of setpoints | 2 |
Setting range | mbar | 2 x 10-3 … 500 |
Hysteresis | % of reading | 10% above lower threshold |
Relay contact | 30 | |
Relay contact: Switching time | ms | <20 |
Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
Measurement range | V | +1.9 … +10.0 |
Accuracy(N2) | ||
1 x 10-3 … 100 mbar | % of reading | ±15% |
5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
100 … 1000 mbar | % of reading | ±50% |
Repeatability (air) | ||
1 x 10-3 … 100 mbar | % of reading | 2% |
Admissible temperature | ||
Operation | °C | +5 … +60 |
Vacuum connection (1) | °C | 80 / 250 (2) |
Storage | °C | -20 … +65 |
Supply voltage | ||
At gauge | V (dc) | +14 …+30 |
Ripple | V (p-p) | ≤1 |
Power consumption | W | ≤1 |
Setpoint | ||
Number of setpoints | Number of setpoints | 2 |
Setting range | mbar | 2 x 10-3 … 500 |
Hysteresis | % of reading | 10% above lower threshold |
Relay contact | 30 | |
Relay contact: Switching time | ms | <20 |
Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
Part Number
Part Number
Accessories
Spare Parts
PSG500 tungsten | |
350-060 | PSG500 DN 16 ISO-KF. |
350-061 | PSG500 1/8" NPT |
350-062 | PSG500 DN 16 CF-R |
350-063 | PSG500 1/2" Tube |
350-064 | PSG500 8-VCR (1/2") |
350-065 | PSG500 4-VCR (1/4") |
350-066 | PSG500 7/16-20 UNF |
350-067 | PSG500 DN 16 ISO-KF, ext. body |
350-068 | PSG500 DN 16 CF-R, ext. body |
PSG500-S tungsten, setpoints | |
350-080 | PSG500-S DN 16 ISO-KF |
350-081 | PSG500-S 1/8" NPT |
350-082 | PSG500-S DN 16 CF-R |
350-083 | PSG500-S 1/2" Tube |
350-084 | PSG500-S 8-VCR (1/2") |
350-085 | PSG500-S 4-VCR (1/4") |
350-086 | PSG500-S 7/16-20 UNF |
350-087 | PSG500-S DN 16 ISO-KF, ext. body |
350-088 | PSG500-S DN 16 CF-R, ext. body |
PSG502-S nickel, setpoints | |
350-140 | PSG502-S DN 16 ISO-KF |
350-141 | PSG502-S 1/8" NPT |
350-142 | PSG502-S DN 16 CF-R |
350-143 | PSG502-S 1/2" Tube |
350-144 | PSG502-S 8-VCR (1/2") |
350-145 | PSG502-S 4-VCR (1/4") |
350-146 | PSG502-S 7/16-20 UNF |
350-147 | PSG502-S DN 16 ISO-KF, ext. body |
350-148 | PSG502-S DN 16 CF-R, ext. body |
PSG510-S tungsten, setpoints, ceramic feedthroughs | |
350-200 | PSG510-S DN 16 ISO-KF |
PSG512-S nickel, setpoints, ceramic feedthroughs | |
350-300 | PSG512-S DN 16 ISO-KF |
PSG500 tungsten | |
211-001 | Clamping ring DN 10-16 ISO-KF |
350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
PSG500-S tungsten, setpoints | |
211-001 | Clamping ring DN 10-16 ISO-KF |
350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
PSG502-S nickel, setpoints | |
211-001 | Clamping ring DN 10-16 ISO-KF |
350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
PSG510-S tungsten, setpoints, ceramic feedthroughs | |
211-001 | Clamping ring DN 10-16 ISO-KF |
350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
PSG512-S nickel, setpoints, ceramic feedthroughs | |
211-001 | Clamping ring DN 10-16 ISO-KF |
350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
PSG500 tungsten | |
350-920 | PSG500 Spare Sensor DN 16 KF |
350-921 | PSG500 Spare Sensor 1/8" NPT |
350-922 | PSG500 Spare Sensor DN 16 CF-R |
350-923 | PSG500 Spare Sensor 1/2" Tube |
350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
350-925 | PSG500 Spare Sensor 7/16-20 UNF |
350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
PSG500-S tungsten, setpoints | |
350-920 | PSG500 Spare Sensor DN 16 KF |
350-921 | PSG500 Spare Sensor 1/8" NPT |
350-922 | PSG500 Spare Sensor DN 16 CF-R |
350-923 | PSG500 Spare Sensor 1/2" Tube |
350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
350-925 | PSG500 Spare Sensor 7/16-20 UNF |
350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
PSG502-S nickel, setpoints | |
350-900 | PSG502 Spare Sensor DN 16 KF |
350-901 | PSG502 Spare Sensor 1/8" NPT |
350-902 | PSG502 Spare Sensor DN 16 CF-R |
350-903 | PSG502 Spare Sensor 1/2" Tube |
350-904 | PSG502 Spare Sensor 8-VCR (1/2") |
350-905 | PSG502 Spare Sensor 7/16-20 UNF |
350-906 | PSG502 Spare Sensor 4-VCR (1/4") |
350-907 | PSG502 Spare Sensor DN 16 KF,ext.body |
350-908 | PSG502 Spare Sensor DN 16 CF-R,ext.body |
PSG510-S tungsten, setpoints, ceramic feedthroughs | |
350-930 | PSG510 Spare Sensor DN 16 KF |
PSG512-S nickel, setpoints, ceramic feedthroughs | |
350-940 | PSG512 Spare Sensor DN 16 KF |
Downloads
Datasheets
PSG50x & PSG51x Datasheet
pdf
•
140,2 KB
•
English
•
Datasheets
PSG50x & PSG51x Datenblatt
pdf
•
367,2 KB
•
German
•
Datasheets
PSG50x & PSG51x Ficha técnica
pdf
•
362,4 KB
•
Spanish
•
Datasheets
PSG50x & PSG51x データシート
pdf
•
446,4 KB
•
Japanese
•
Datasheets
PSG50x & PSG51x 数据表
pdf
•
421,7 KB
•
Chinese
•
Datasheets
PSG50x & PSG51x 데이터시트
pdf
•
355,0 KB
•
Korean
•
Datasheets
Manuals
3D Step Files
PSG500 3D 1/2" Tube
zip
•
265,9 KB
•
3D Files
PSG500 3D 1/8" NPT
zip
•
271,2 KB
•
3D Files
PSG500 3D 16CF-R
zip
•
284,1 KB
•
3D Files
PSG500 3D 16CF-R Long Tube
zip
•
295,4 KB
•
3D Files
PSG500 3D 16KF
zip
•
195,3 KB
•
3D Files
PSG500 3D 16KF Long Tube
zip
•
281,0 KB
•
3D Files
PSG500 3D 4-VCR
zip
•
278,4 KB
•
3D Files
PSG500 3D 7/16-20 UNF
zip
•
277,9 KB
•
3D Files
PSG500 3D 8-VCR
zip
•
279,6 KB
•
3D Files
PSG500 3D G1/8"
stp
•
2,2 MB
•
3D Files
PSG500-S 3D 1/2" Tube
zip
•
337,7 KB
•
3D Files
PSG500-S 3D 1/8" NPT
zip
•
342,8 KB
•
3D Files
PSG500-S 3D 16CF-R
zip
•
355,3 KB
•
3D Files
PSG500-S 3D 16CF-R Long Tube
zip
•
367,1 KB
•
3D Files
PSG500-S 3D 16KF
zip
•
319,0 KB
•
3D Files
PSG500-S 3D 16KF Long Tube
zip
•
281,0 KB
•
3D Files
PSG500-S 3D 4-VCR
zip
•
350,3 KB
•
3D Files
PSG500-S 3D 7/16-20 UNF
zip
•
349,7 KB
•
3D Files
PSG500-S 3D 8-VCR
zip
•
351,4 KB
•
3D Files
PSG502-S 3D 1/2" Tube
zip
•
337,7 KB
•
3D Files
PSG502-S 3D 1/8" NPT
zip
•
342,8 KB
•
3D Files
PSG502-S 3D 16CF-R
zip
•
355,3 KB
•
3D Files
PSG502-S 3D 16CF-R Long Tube
zip
•
367,1 KB
•
3D Files
PSG502-S 3D 16KF
zip
•
295,4 KB
•
3D Files
PSG502-S 3D 16KF Long Tube
zip
•
281,0 KB
•
3D Files
PSG502-S 3D 4-VCR
zip
•
350,3 KB
•
3D Files
PSG502-S 3D 7/16-20 UNF
zip
•
349,7 KB
•
3D Files
PSG502-S 3D 8-VCR
zip
•
351,4 KB
•
3D Files
The product is used in the following markets