Vacuum Feedthroughs & More
Rotary/Linear Motion Feedthrough
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
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Digital interface
Analog output signal
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INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.
The available flange designs ISO-KF / ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbarl/s. For UHV an all metal designed feedthrough is also available.
Advantages
- Two FPM shaft seals
- Direct push/pull and rotary actuation
- With locking ring and optional anti-rotation device
- 2011/65/EU RoHS compliant
Specifications
FCH016-H
FCH025-H
FCH040-H
| Vacuum connection | DN 16 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 3 / Ø5mm | |
| Travel | mm | 50 |
| Shaft load | ||
| Radial force at max.travel | N | 10 |
| Torsion torque | N•m | 2 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.1 |
| Vacuum connection | DN 25 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 4 / Ø8mm | |
| Travel | mm | 100 |
| Shaft load | ||
| Radial force at max.travel | N | 15 |
| Torsion torque | N•m | 8 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.2 |
| Vacuum connection | DN 40 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 6 / Ø12mm | |
| Travel | mm | 150 |
| Shaft load | ||
| Radial force at max.travel | N | 30 |
| Torsion torque | N•m | 20 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.3 |
Part Number
| FCH016-H | |
| 214-320 | FCH016-H Rotary/linear motion feedthrough |
| 214-072 | Anti-rotation device DN 16 |
| FCH025-H | |
| 214-322 | FCH025-H Rotary/linear motion feedthrough |
| 214-073 | Anti-rotation device DN 25 |
| FCH040-H | |
| 214-324 | FCH040-H Rotary/linear motion feedthrough |
| 214-074 | Anti-rotation device DN 4 |
Downloads
3D Step Files
FCH016-H anti-rotation device
zip
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36,4 KB
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3D Files
FCH016-H feedthrough
zip
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50,0 KB
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3D Files
FCH025-H anti-rotation device
zip
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33,4 KB
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3D Files
FCH025-H feedthrough
zip
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51,5 KB
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3D Files
FCH040-H anti-rotation device
zip
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36,7 KB
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3D Files
FCH040-H feedthrough
zip
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54,6 KB
•
3D Files
