Vacuum Feedthroughs & More

Rotary/Linear Motion Feedthrough

Rotary-Linear-Motion-Feedthroughs-ISO-KF
Drop-in Options

Revolutionize your vacuum gauge experience with us!

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
Your configuration has been successfully sent!

INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.

The available flange designs ISO-KF/ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbar•l/s. For UHV an all metal designed feedthrough is also available.

Advantages

  • Two FPM shaft seals
  • Direct push/pull and rotary actuation
  • With locking ring and optional anti-rotation device
  • 2011/65/EU RoHS compliant

Specifications

FCH016-H
FCH025-H
FCH040-H
Vacuum connection DN16 ISO-KF
Feedthrough/seal FPM
Shaft connection M3/Ø5mm
Travelmm50
Shaft load
Radial force at max. travelN10
Torsion torqueNm2
Tightness, staticmbar•l/s1 x 10-9
Pressure (absolute) 1 x 10-8 mbar...1bar
Operating temperature°C50
Bakeout temperature°C110
Materials exposed 
to process media
 stainless steel 304/1.4301, 
aluminum 6082

Weight

 

kg0.1
Vacuum connection DN25 ISO-KF
Feedthrough/seal FPM
Shaft connection M4/Ø8mm
Travelmm100
Shaft load
Radial force at max. travelN15
Torsion torqueNm8
Tightness, staticmbar•l/s1 x 10-9
Pressure (absolute) 1 x 10-8 mbar...1bar
Operating temperature°C50
Bakeout temperature°C110
Materials exposed 
to process media
 stainless steel 304/1.4301, 
aluminum 6082

Weight

 

kg0.2
Vacuum connection DN40 ISO-KF
Feedthrough/seal FPM
Shaft connection M6/Ø12mm
Travelmm150
Shaft load
Radial force at max. travelN30
Torsion torqueNm20
Tightness, staticmbar•l/s1 x 10-9
Pressure (absolute) 1 x 10-8 mbar...1bar
Operating temperature°C50
Bakeout temperature°C110
Materials exposed 
to process media
 stainless steel 304/1.4301, 
aluminum 6082

Weight

 

kg0.3
Download full specifications

Part Number

Part NumberDescription
FCH016-H
214-320Rotary/linear feedthrough, DN16 ISO-KF
214-072Anti-rotation device, DN16 ISO-KF
FCH025-H
214-322Rotary/linear feedthrough, DN25 ISO-KF
214-073Anti-rotation device, DN25 ISO-KF
FCH040-H
214-324Rotary/linear feedthrough, DN40 ISO-KF
214-074Anti-rotation device, DN40 ISO-KF
We require your consent for video content
More Information