4. Rotary/Linear Motion Feedthrough
Vacuum Feedthroughs & More

Rotary/Linear Motion Feedthrough

Rotary-Linear-Motion-Feedthroughs-ISO-KF

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.

The available flange designs ISO-KF / ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbarl/s. For UHV an all metal designed feedthrough is also available.

Advantages

  • Two FPM shaft seals
  • Direct push/pull and rotary actuation
  • With locking ring and optional anti-rotation device
  • 2011/65/EU RoHS compliant

Specifications

FCH016-H
FCH025-H
FCH040-H
Vacuum connection DN 16 ISO-KF
Feedthrough/seal FPM
Shaft connection M 3 / Ø5mm
Travelmm50
Shaft load
Radial force at max.travelN10
Torsion torqueN•m2
Tightness, staticmbar•L/s1 x 10-9
Pressure (absolute) 1 x 10-8 mbar ... 1bar
Operating temperature°C50
Bakeout temperature°C110
Materials exposed to process media stainless steel 304/1.4301, aluminum 6082
Weightkg0.1
Vacuum connection DN 25 ISO-KF
Feedthrough/seal FPM
Shaft connection M 4 / Ø8mm
Travelmm100
Shaft load
Radial force at max.travelN15
Torsion torqueN•m8
Tightness, staticmbar•L/s1 x 10-9
Pressure (absolute) 1 x 10-8 mbar ... 1bar
Operating temperature°C50
Bakeout temperature°C110
Materials exposed to process media stainless steel 304/1.4301, aluminum 6082
Weightkg0.2
Vacuum connection DN 40 ISO-KF
Feedthrough/seal FPM
Shaft connection M 6 / Ø12mm
Travelmm150
Shaft load
Radial force at max.travelN30
Torsion torqueN•m20
Tightness, staticmbar•L/s1 x 10-9
Pressure (absolute) 1 x 10-8 mbar ... 1bar
Operating temperature°C50
Bakeout temperature°C110
Materials exposed to process media stainless steel 304/1.4301, aluminum 6082
Weightkg0.3
Download full specifications

Part Number

FCH016-H
214-320FCH016-H Rotary/linear motion feedthroug
214-072Anti-rotation device DN 16
FCH025-H
214-322FCH025-H Rotary/linear motion feedthroug
214-073Anti-rotation device DN 25
214-349FCH025-H Rotary/linear motion feedthroug
FCH040-H
214-324FCH040-H Rotary/linear motion feedthroug
214-074Anti-rotation device DN 4