Vacuum Feedthroughs & More

Rotary/Linear Motion Feedthrough

Drop-in Options

Revolutionize your vacuum gauge experience with us!

INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.

The available flange designs ISO-KF/ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10^-9 mbar•l/s. For UHV an all metal designed feedthrough is also available.

Advantages

Two FPM shaft seals
Direct push/pull and rotary actuation
With locking ring and optional anti-rotation device
2011/65/EU RoHS compliant

Specifications

FCH016-H

FCH025-H

FCH040-H

Vacuum connection		DN16 ISO-KF

Feedthrough/seal		FPM

Shaft connection		M3/Ø5mm

Travel	mm	50

Shaft load
Radial force at max. travel	N	10
Torsion torque	Nm	2

Tightness, static	mbar•l/s	1 x 10^-9

Pressure (absolute)		1 x 10^-8 mbar...1bar

Operating temperature	°C	50
Bakeout temperature	°C	110

Materials exposed to process media		stainless steel 304/1.4301, aluminum 6082

Weight	kg	0.1

Vacuum connection		DN25 ISO-KF

Feedthrough/seal		FPM

Shaft connection		M4/Ø8mm

Travel	mm	100

Shaft load
Radial force at max. travel	N	15
Torsion torque	Nm	8

Tightness, static	mbar•l/s	1 x 10^-9

Pressure (absolute)		1 x 10^-8 mbar...1bar

Operating temperature	°C	50
Bakeout temperature	°C	110

Materials exposed to process media		stainless steel 304/1.4301, aluminum 6082

Weight	kg	0.2

Vacuum connection		DN40 ISO-KF

Feedthrough/seal		FPM

Shaft connection		M6/Ø12mm

Travel	mm	150

Shaft load
Radial force at max. travel	N	30
Torsion torque	Nm	20

Tightness, static	mbar•l/s	1 x 10^-9

Pressure (absolute)		1 x 10^-8 mbar...1bar

Operating temperature	°C	50
Bakeout temperature	°C	110

Materials exposed to process media		stainless steel 304/1.4301, aluminum 6082

Weight	kg	0.3

Download full specifications

Part Number

Part Number	Description

FCH016-H
214-320	Rotary/linear feedthrough, DN16 ISO-KF
214-072	Anti-rotation device, DN16 ISO-KF

FCH025-H
214-322	Rotary/linear feedthrough, DN25 ISO-KF
214-073	Anti-rotation device, DN25 ISO-KF

FCH040-H
214-324	Rotary/linear feedthrough, DN40 ISO-KF
214-074	Anti-rotation device, DN40 ISO-KF