Monitors
SemiQCM™ SR Sensors for Precursor Monitoring
Making Excellence Repeatable
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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Protect and Grow Your Profit with Precision Rate and Thickness Monitoring
The SemiQCM™ SR sensor is one component of a system for precursor monitoring with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).
Semi Process Monitoring can be used in semiconductor applications for end point detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.
The failure to deliver precursor to a wafer can be detected in as little as one wafer.
Features
- QCM data monitored at 10Hz
- FabGuard correlates QCM data to tool state and process step
- Precise measurement of deposition or etch rates
- Sensitivity & precision for sub-monolayer thickness measurement
Advantages
- Real-Time, in situ process monitoring
- Prevent over-etching, identify chamber clean end point
- Identify equipment or process state fault
Typical Applications
- Semiconductor Manufacturing
Specifications
| Maximum Temperature | 200°C |
| Sensor head Size (Maximum envelope) | 23.87 mm O.D. x 29.19 mm (0.94 in. O.D. x 1.15 in.) |
| Materials | |
| Body and Holder | 304 stainless steel |
| Springs | Au plated BeCu |
| Coaxial Line | 5 mm (1.88 in.) O.D. stainless steel |
| Other Mechanical Parts | 18-8 or 304 stainless steel, Hastelloy® c276 |
| Insulators | >99% Al2O3 in vacuum: Teflon® used elsewhere |
| Wire | 1. Ni (in vacuum) 2. Ni plated Cu (elsewhere) |
| Braze | Vacuum process high temperature NiCr alloy |
| Crystal | 13.97 mm (0.550 in.) diameter |
Part Number
Consumbales
Spare parts
| Part Number | Description |
| 750-7000-G5 | SEMI QCM SENSOR ASSY 50MM |
| 750-7000-G6 | Semi QCM Sensor Assy 60mm |
| 750-7000-G7 | Semi QCM Sensor Assy 70mm |
| 750-7000-G8 | Semi QCM Sensor Assy 80mm |
| 750-7000-G9 | Semi QCM Sensor Assy 90mm |
| 750-7000-G10 | Semi QCM Sensor Assy 100mm |
| 750-7000-G11 | Semi QCM Sensor Assy 110mm |
| 750-7000-G12 | Semi QCM Sensor Assy 120mm |
| 750-7000-G13 | Semi QCM Sensor Assy 130mm |
| 750-7000-G14 | Semi QCM Sensor Assy 140mm |
| 750-7000-G15 | Semi QCM Sensor Assy 150mm |
| Part Number | Description |
| 750-7013-G1S | Crystal Holder Assembly Spare |
| 750-1090-G10 | Sensor Crystals, 6MHz, SC Alloy |
| Part Number | Description |
| 007-023 | Ceramic Retainer |
| 750-171-P1 | Finger spring contact |
| 750-7005-G1S | Crystal Holder and Retainer Spring Spare Assembly |
The product is used in the following market
