SemiQCM™ CR Sensors for Precursor Monitoring

Making Excellence Repeatable


Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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Protect and Grow Your Profit with Precision Rate and Thickness Monitoring

The SemiQCM™ CR sensor is a chemically inert sensor that can be installed in some of the harshest CVD or ALD chambers. SemiQCM CR is one component of a system for precursor monitoring with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).

Semi Process Monitoring can be used in semiconductor applications for end point detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.

The failure to deliver precursor to a wafer can be detected in as little as one wafer.


  • QCM data monitored at 10Hz
  • FabGuard correlates QCM data to tool state and process step
  • Precise measurement of deposition or etch rates
  • Sensitivity & precision for sub-monolayer thickness measurement


  • Real-Time, in situ process monitoring
  • Prevent over-etching, identify chamber clean end point
  • Identify equipment or process state fault

Typical Applications

  • Semiconductor Manufacturing


Maximum Temperature200°C
Sensor head Size (Maximum envelope)15 mm O.D. x 39.2 mm (0.59 in. O.D. x 1.54 in.)
SemiQCM CR Body and Holder6061 Aluminum
SemiQCM CR SpringsBeryllium Nickel
SemiQCM CR Nut and Conductor TubeInconel 625
SemiQCM CR Other Mechanical PartsNickel 200, Aluminum, or Inconel 625
Insulators>99% Al2O3 in vacuum: Teflon® used elsewhere
Wire1. Ni (in vacuum) 2. Ni plated Cu (elsewhere)
Download full specifications


Part NumberDescription
750-7053-G1S8 mm CR Crystal Holder Assembly with Alloy Crystal Installed
750-7053-G2S8 mm CR Crystal Holder Assembly with Alumina Crystal Installed
750-7053-G3S8 mm CR Crystal Holder Assembly with Yttria Crystal Installed
750-7055-G1SCrystal Holder, Finger Spring, and Retainer Spring Spare Assembly
750-1089-G10SENSOR CRYSALS, 6 MHZ, ALLOY, 8 mm, 10 crystals
750-1127-G5SENSOR CRYSTALS, 6 MHz, ALUMINA, 8 mm, 5 crystals
750-1128-G5SENSOR CRYSALS, 6 MHZ, YTTRIA, 8 mm, 5 crystals

Spare parts

Part NumberDescription
750-7055-G1SCrystal Holder, Finger Spring, and Retainer Spring Spare Assembly
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