Guardian™ EIES Controller

Simultaneous Deposition of Up to Eight Materials


Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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Ideal for CIGS Thin Films

Guardian can control deposition rates from 0.1 to 10,000 Å/s. It operates one or two sensors, up to 8 optical inputs and controls up to 8 deposition sources, enabling codeposition of up to 8 materials.

INFICON Guardian is ideal for applications such as fabrication of photovoltaic modules, OLEDs, photovoltaics, superconducting thin films and MBE.

The Guardian Codeposition System is based on Electron Impact Emission Spectroscopy (EIES). Using EIES, the material being deposited is excited by a thermionic emitter, which results in creation of photons. The light created passes through an optical filter to a photomultiplier tube (PMT) detector, which measures the intensity of emission of the passed wavelength. The INFICON Guardian Controller then generates a signal to control the source for that material. Additional detectors, with appropriate optical filters, are used for multiple materials.

A complete Guardian system consists of at least one sensor, one PMT detector, an optical filter, a Guardian controller unit, and a PC (user-supplied) with Guardian software. EIES is generally used to control deposition of multiple materials, so most EIES systems include additional sensors, detectors, optical components such as beam splitters, and QCMs for calibration or controlling deposition rate for some materials. More information on typical systems can be found in the Guardian Configuration Guide in the Downloads tab below.


To Configure a Guardian Codeposition System, Consider the Following

  • What are the primary and secondary emission wavelengths for your deposition materials?

    If different materials have peaks too close to each other, you may need to monitor a secondary wavelength, which has lower signal strength.
  • During the deposition process, what background gases are present in your vacuum chamber and what are the emission wavelengths for those gases?

    If emissions from background gases interfere with the deposition materials, a gas compensating sensor is recommended.

EIES is most effective with the uniquely defined spectra of atomic species. Molecular species that generate unstable or broad emission spectra cannot be measured accurately. EIES is not recommended for organic materials. These, and other factors, determine the optimum EIES system configuration for each specific application.


  • Monitor and control simultaneous deposition of up to 8 materials
  • Deposition rates from 0.1 to 10,000 Å/s
  • Integrated EIES and QCM thin film process control
  • 12 relay outputs and 12 digital inputs
  • Windows-based software for setup and operation
  • Compatible with INFICON Sentinel® sensors


Operating pressure<5x10-4 Torr
Temperature450° C maximum during operation and/or bakeout
Control outputsEight source control outputs, 0 to ±10 VDC programmable
Computer user-supplied:Any PC with Windows® Vista/XP/2000/7/8/10 operating system, and Ethernet or RS-232 interface

Part Numbers

Part NumberDescription
782-900-031Guardian Controller for one sensor (standard or gas compensating)
782-900-050Guardian Controller for two sensors (standard or gas compensating)

Accessories & Spare Parts

Spare Parts
Part NumberDescription
EIES Sensors 
016-600-G22Guardian Standard Single Sensor and Feedthrough Assembly, 22 in. (539 mm), CF40 Flange
016-601-G22Guardian Gas Compensating Sensor and Feedthrough Assembly, 22 in. (539 mm), CF40 Flange
Beam SplittersFiber Optic Beam Splitters split the beam of light from the sensor to allow measurement of multiple materials per EIES sensor.
782-900-034Guardian Fiber Optic Beam Splitter (1:3) - 400 mm length
782-900-034-x-yyyGuardian Fiber Optic Beam Spliter (1:x) - yyy mm length
Filament CablesConnects the EIES sensor to the Guardian controller
600-1406-P10Guardian Single Filament cable, 10 ft. (3 m) - For standard EIES sensor
600-1406-P40Guardian Single Filament cable, 40 ft. (12 m) - For standard EIES sensor
600-1407-P10Guardian Dual Filament cable, 10 ft. (3m) - For gas compensating EIES sensor
600-1407-P40Guardian Dual Filament cable, 40 ft. (12 m) - For gas compensating EIES sensor
PMT Detector 
782-900-030Guardian PMT Detector
PMT Detector CablesConnects the PMT Detector to the Guardian controller
782-505-065Guardian Detector cable 10 ft. (3 m)
782-505-065-40Guardian Detector cable, 40 ft. (12 m)
Optical FiltersSelect the wavelength appropriate for your material
782-900-035-202Optical filter - 202nm, BP10nm (Zn)
782-900-035-241Optical Filter - 241nm, BP10nm (Co, Au)
782-900-035-252Optical Filter - 252nm, BP10nm, (Si)
782-900-035-265Optical Filter - 265nm, BP10nm, (Ge, Pt, Ta, Ir)
782-900-035-267Optical Filter, 267 nm, Guardian
782-900-035-294Optical Filter 294nm, BP2nm, (Hf) (Ga [when using a gas compensating sensor])
782-900-035-304Optical Filter 304nm, BP2nm (Ba, In [when using a gas compensation sensor])
782-900-035-325Optical Filter - 325nm, BP10nm (Cu, Cd)
782-900-035-358Optical Filter - 358nm, BP10nm, (Nb, U, Cr)
782-900-035-364Optical Filter - 364nm, BP10nm (Ti, Pb)
782-900-035-396Optical Filter - 396nm, BP10nm, (Al)
782-900-035-417Optical Filter - 417nm, BP2nm, (Ga)
782-900-035-451Optical Filter - 451nm, BP5nm, (In)
Part NumberDescription
016-201-G1Emitter assembly for all 016-400-Gx sensors used in 016-600-Gxx and -601-Gxx
782-900-038Guardian Photomultiplier Tube Replacement
016-509-G22Guardian Sensor EIES In-vacuum Cable, 22 in. (559 mm), other lengths available
782-530-015Guardian Sensor Filament Replacement (for discontinued 782-900-029 and -052 sensors)
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