Non- Invasive, high speed, DC arc dection for real-time process control
Flange connection to vacuum chamber
Analog output signal
DN 16 ISO-KF
1.2 - 8.68 V
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The ADC100 DC Arc Detector system connects to a DC power generator in order to detect plasma arcing in real time. This provides the ability to interrupt a wafer process and notify engineers of potential hardware or product damage.
Software integration to the tool through FabGuard Sensor Integration and Analysis System
Data collection at 250 kHz per channel
Custom cables connect to most DC generators
Detects arcs quickly with pre-defined analysis tools