RF Sensing Technology
ADC100
Non- Invasive, high speed, DC arc dection for real-time process control
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The ADC100 DC Arc Detector system connects to a DC power generator in order to detect plasma arcing in real time. This provides the ability to interrupt a wafer process and notify engineers of potential hardware or product damage.
Features
- Software integration to the tool through FabGuard Sensor Integration and Analysis System
- Data collection at 250 kHz per channel
- Custom cables connect to most DC generators
- Detects arcs quickly with pre-defined analysis tools
- Endpoint detection capability
- Worldwide application support
Downloads
The product is used in the following markets
