RF Sensing Technology
ADC100
Non-invasive, high-speed, DC arc detection for real-time process control
The ADC100 DC Arc Detector system connects to a DC power generator in order to detect plasma arcing in real time. This provides the ability to interrupt a wafer process and notify engineers of potential hardware or product damage.
Features
- Software integration to the tool through FabGuard Sensor Integration and Analysis System
- Data collection at 250 kHz per channel
- Custom cables connect to most DC generators
- Detects arcs quickly with pre-defined analysis tools
- Endpoint detection capability
- Worldwide application support
The product is used in the following markets
