Sensors & Feedthroughs

Easy Rate Sensor Feedthroughs

Easy-Rate-Sensor-Feedthroughs

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON offers a variety of Quartz Crystal Monitor (QCM) sensor feedthroughs to accommodate the Easy Rate Sensors. CF40 (2.75 in. ConFlat®) and 2.54 cm (1 in.) bolt style feedthroughs are available with various combinations of electrical connections, water cooling, and air tubes.

INFICON feedthroughs designed specifically for the Easy Rate Sensors may also be optionally equipped with bored-through tube fittings for easily installing user-customized sensor lengths.

A typical feedthrough electrical connection consists of a coaxial BNC connector on the atmosphere side and a Microdot® connector on the vacuum side. This style of electrical connection is meant for use with the in vacuum cables ordered with or in addition to the Easy Rate Sensors.

Note: Water adapter tubes on the feedthroughs have a 6.35 mm (1/4 in.) outer diameter (OD) and are accepting of a 4.8 mm (3/16 in.) OD tube.


The following table is a quick reference for feedthrough requirements and part numbers based on sensor type.

Features

  • 2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available
  • Available with bored-through tube fittings

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