Advanced Vacuum Technology for Industrial Applications
INFICON's Gemini® MxG5xx delivers precise vacuum measurement with low maintenance, making it a top choice for industrial and research applications worldwide.

The INFICON Gemini® Inverted Magnetron Vacuum Gauge is a reliable, durable, and versatile vacuum measurement solution designed for industrial and scientific applications. The Gemini MPG50x combines cold cathode and Pirani sensors, measuring from atmospheric pressure to 1x10⁻⁹ mbar, while the Gemini MAG50x focuses exclusively on cold cathode measurements from 1x10⁻² mbar to 1x10⁻⁹ mbar. With a patented low magnetic stray field design and an interchangeable dual chamber sensor, the Gemini reduces maintenance requirements and ensures reliable long-term performance.
Now featuring PROFINET and EtherCAT compatibility, the Gemini offers seamless system integration and includes a ceramic-coated option for enhanced corrosion resistance in harsh environments. Its compact size and robust design make it ideal for applications in semiconductor manufacturing, coating technology, high-energy physics, and industrial research.
Gemini coated: A High-Demand Vacuum Measurement Device
A significant milestone was achieved with the successful evaluation of an ion implanting tool, marking an important step in the adoption of the Gemini MAG504 metrology technology. The Gemini MAG504 has been successfully integrated into high-current and high-energy implanter platforms, further establishing itself as a leading solution for high-performance semiconductor applications.


Global Interest in Gemini
The strong performance of the Gemini in Europe has also generated interest in other regions, including North America. Discussions are ongoing regarding its potential integration into OEM implanter solutions, supporting broader global adoption and market growth. These developments reflect the growing confidence in the Gemini MAG504 as a key technology for advanced semiconductor manufacturing. The continuous qualification efforts and increasing purchase orders demonstrate its critical role in addressing the evolving needs of the global semiconductor industry.


A Basic Guide to Cold Cathode Gauges
For those interested in deepening their understanding of vacuum technology, we recommend attending our upcoming live webinar: "Mastering Vacuum Measurements – A Basic Guide to Cold Cathode Gauges." This session offers valuable insights into the principles, advantages, and practical use of cold cathode gauges in vacuum applications. Join the webinar and expand your expertise.

