FabRecover

INFICON’s Edge-Based Computing FabGuard Facilities Monitoring System and integrated HMI provides integration of facilities and subfab components with process information. Working alongside with data collected from the process equipment, INFICON makes it possible to manage and control multiple subfab/facilities components with regard to their impact on processes.

Smart control/Energy savings: Reduced energy usage by linking tool states to facilities

Migrate to condition-based consumption: Reduced use of consumables/chemicals/gases (reduction of 15-35% typical)

Regulatory compliance and reporting: Lower CO, CO2, NOx etc. emissions, cumulative consumption reporting to agencies

Increase FDC tool Digital Twin fidelity: Increased awareness by adding facility/subfab data to process data

Smart and Predictive maintenance scheduling: Use data to create predictive maintenance routines

FabGuard is a Smart Tool-based Digital Twin enabling engineers to collect data from a wide range of sensors, gauges, facilities, and other devices to develop the most comprehensive view of process tools in the industry.

• Pumps: Drive Current, Temperatures, Pressures, Purge Flows, Vibrational, Alarms
• Abatement: Gas Consumption, Operational Values, Alarms
• Exhaust: Differential Pressure, Temperature, Byproduct Deposition
• Heaters: Heater Current/Voltage, Temperature
• Chillers: Flow Rates, Temperature

Combining process information with the subfab and facilities data to obtain a clear view of potential process impacts and better methods for control. INFICON uses the Smart Tool-based Digital Twin to predict excursions, manage maintenance activities, and identify opportunities for cost savings.