Sensors & Feedthroughs
SemiQCM® SR Sensors for Precursor Monitoring
Making Excellence Repeatable
Protect and Grow Your Profit with Precision Rate and Thickness Monitoring
The SemiQCM SR sensor is one component of a system for precursor monitoring, with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).
Semi Process Monitoring can be used in semiconductor applications for endpoint detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.
The failure to deliver precursor to a wafer can be detected in as little as one wafer.
Features
- QCM data monitored at 10 Hz
- FabGuard correlates QCM data to tool state and process step
- Precise measurement of deposition or etch rates
- Sensitivity & precision for sub-monolayer thickness measurement
Advantages
- Real-time, in situ process monitoring
- Prevent over-etching, identify chamber clean end point
- Identify equipment or process state fault
Typical Applications
- Semiconductor Manufacturing
Specifications
| Maximum Temperature | 200°C |
| Sensor Head Size (maximum envelope) | 23.9 mm O.D. x 29.2 mm (0.94 in. O.D. x 1.15 in.) |
| Sensor Length (in vacuum) | 50–150 mm (1.97–5.91 in.) |
| Mounting Feedthrough | ISO KF/CF flange |
| Materials | |
| Body and Holder | 304 stainless steel |
| Springs | Au-plated BeCu |
| Coaxial Line | 4.8 mm (0.188 in.) O.D. stainless steel |
| Other Mechanical Parts | 18-8 or 304 stainless steel, nickel C276 |
| Insulators | >96% Al2O3 in vacuum: Teflon® used elsewhere |
| Wire | Ni in vacuum, Ni-plated Cu elsewhere |
| Braze | Vacuum-process high-temperature NiCr alloy |
| Crystal | 14.0 mm (0.551 in.) diameter |
Consumables
| Part Number | Description |
| 750-1090-G10 | SC-cut Sensor Crystals, alloy, pack of 10 |
| 750-1137-G5 | SC-cut Sensor Crystals, yttria, pack of 5 |
| 750-1138-G5 | SC-cut Sensor Crystals, alumina, pack of 5 |
Spare Parts
| Part Number | Description |
| 007-023 | Ceramic Retainer, Front Load Sensor |
| 750-7065-G1S | 14MM SR LOCKING CRYSTAL HOLDER SPARE |
| 750-7069-G1S | 14 MM SR LOCKING SENSOR BODY ASSY SPARE |
| 750-7084-G1S | 14MM SR CRYSTAL HOLDER ASSY SPARE YTTRIA |
| 750-7084-G2S | 14MM SR CRYSTAL HOLDER ASY SPARE ALUMINA |
| 750-7084-G3S | 14MM SR CRYSTAL HOLDER ASSY SPARE ALLOY |
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Application Notes
The product is used in the following market
