INFICON’s FabGuard® FDC System provides unparalleled capability to connect, collect, and translate data into meaningful information. INFICON uses this information to develop deeper insights into tool capability and optimization. Working alongside proven FDC techniques, powerful unsupervised Machine Learning with SmartFDC™ enables FabGuard to automatically detect when changes occur.
Seamless integration of process equipment and sensor data allows data from multiple sources to be available for analysis
Edge computing enables data collection and analysis to happen at the source for faster response and enhanced detection
On Premises or Cloud-based installation offered to allow maximum flexibility of performance and cost
Real Time and Run-by-Run analysis reduces scrap and improves process control
World-class connectivity to sensors, gauges, IoT/IIoT, process tools, Subfab and Facilities equipment, FPS Dashboard, FPS Metrology Sampling Optimizer, and other factory systems
Automatic Machine Learning of every process in the factory with SmartFDC