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IMPORTANT:
Our technical support helps you solving issues for your applications with INFICON equipment, also remotely.
IMPORTANT:
Customer Support will assist you for other questions regarding your INFICON order and/or equipment.
IMPORTANT:
If an RMA (Return Material Authorization) or repair update is needed our service team is here to support you. Our Service Center Teams not only perform repairs on INFICON equipment, we also offer a variety of additional services, such as preventive maintenance, calibration, analysis, etc.
IMPORTANT:
Our spare parts experts support you in finding the right spare part for your INFICON equipment.
Product search
Product group
Chemical Detection & Utility Monitoring
Gas Analysis
Leak Detectors
Manufacturing Software
Protective Coating
RF Sensing Technology
Recovery & Evacuation
Thin Film Deposition
Vacuum Components
Vacuum Gauge & Controller
or
Product name
AST-ID Integrated
Adapter Flange ISO-K / ISO-F
Adaptor ISO-KF / ISO-K - Aluminum
Adaptor ISO-KF / ISO-K - Stainless Steel
ECOTEC® E3000
Wey-TEK Refrigerant Charging Scale
3D Scanner
3D Scanner
ADC100
ALD Sensor
AST-ID
AST100
AST100FG
AST200IR
AST300PPM
Adapter Flange ISO-K / ISO-F
Adaptor CF-F / ISO-K
Adaptor CF-F / ISO-KF
Adaptor Flange ISO-K / CF
Adaptor Flange ISO-K / DN
Adaptor Flange ISO-K / ISO-KF - Aluminum
Adaptor Flange ISO-K / ISO-KF - Stainless Steel
Adaptor ISO-KF / ISO-CF
Adaptor ISO-KF / ISO-K - Aluminum
Adaptor ISO-KF / ISO-K - Stainless Steel
Adaptor ISO-KF / NPT Female
Adaptor ISO-KF / NPT Male
Adaptor ISO-KF / Swagelok
Adaptor ISO-KF / VCR Female
Adaptor ISO-KF / VCR Male
Advanced Process Control (FabControl)
Aluminium Seals
Aluminum Seal
Aluminum Seal
BAG055
BAG05x
BAG302
BAG402
BAG552
BCG450
BCG552
BPG400
BPG402
BPG402S
BPG552
Ball Bearings
Bellows CF
Blang Flange - Stainless Steel 304
Blank Flange - Aluminum
Blank Flange - Aluminum ISO-K
Blank Flange - Stainless Steel 316L
Blank Flange - Stainless Steel ISO-K
Blank Flange - Steel ISO-K
Blank Flange Rotatable Stainless Steel 304L
Blank Flange Rotatable Stainless Steel 316LN
Blank Flange Stainless Steel 304L
Blank Flange Stainless Steel 316LN
Bulkhead Clamp with Inch Screws
Bulkhead Clamp with Metric Screws
CDG020D
CDG025D
CDG025D-X3
CDG025D-X3 4 - 20 mA
CDG025D2 EtherCAT
CDG045D
CDG045D2
CDG045Dhs
CDG100D
CDG100D2
CDG100Dhs
CDG160D
CDG200D
CDGsci
CDS500D
CDS530D
CHLD Pernicka 700H
CI-100 Crucible Indexer (discontinued)
CMS 5000
CO Check Carbon Monoxide Meter
CP7
Calibration Leaks for He-Vacuum Leak Detectors UL1/3/5/6000 Fab-Product Series
Calibration Leaks for P3000 (XL) and XL3000flex
Calibration Leaks for Refrigerant Sniffer Leak Detectors
Calibration Leaks for Sensistor Industrial Hydrogen Leak Detectors
Calibration Leaks for System Integration
Calibration Leaks with Checkport for Refrigerant Sniffer Leak Detector
Capacity Analyzer
Centering Ring - Aluminium
Centering Ring - Aluminum, Stainless Steel ISO-K
Centering Ring Aluminium
Centering Ring Stainless Steel 303
Centering Ring Stainless Steel 316L
Centering Ring with Baffle
Centering Ring with Filter
Centering Ring with Fine Filter
Centering Ring with Fine Filter ISO-K
Centering Ring with Throttle
Centering Ring without O-Ring
Chain Clamp
Charging Scales (discontinued)
Clamp - Stainless Steel 316
Clamp - Steel
Clamping Element
Clamping Ring with Hex. Nut
Clamping Ring with Wing Nut
Claw Clamp - Steel
Claw Clamp for Base Plate with Sealing Groove - Steel
Claw Clamp for Flange with Sealing Groove - Steel
Claw Clamp with Hex. Head Screw
Claw Clamp with Hex. Socket Cap Screw
Coaxial Feedthroughs BNC MHV
Coaxial Feedthroughs BNC MHV
Collar Flange with Retaining Ring
Compass
Compensator
Complete Gas Injection Kit
Composer Elite™ Gas Concentration Controller (discontinued)
Composer™ Gas Concentration Controller (discontinued)
Contura S400
Contura S600
Cool Drawer Dual Sensor
Cool Drawer Single Sensor
Copper Gasket
Copper Gasket Silver Plated
Cross - Aluminum ISO-KF
Cross - Stainless Steel 304L
Cross - Stainless Steel ISO-K
Cross - Stainless Steel ISO-KF
Crystal 12 Sensor
CrystalSix Sensor
CrystalTwo
Cycle Time Analyzer
Cygnus 2 Thin Film Deposition Controller
Cygnus® Thin Film Deposition Controller (discontinued)
D-TEK (discontinued)
D-TEK 3
D-TEK CO2 (discontinued)
D-TEK Select (discontinued)
D-TEK Stratus
DI 2000, DI 200
DN16 CF-F
DN16 ISO-KF
DN25-DN50-ISO-KF
DN40 CF-F
DN40 ISO-KF
DN40-KF
Double Cross Piece - Stainless Steel 304L
EBS-530 Electron Beam Sweep Controller (discontinued)
ECOTEC® E3000
ECOTEC® E3000
ELT Vmax
ELT3000 PLUS
EXPLORER™ PORTABLE GAS CHROMATOGRAPH
EXTRIMA®
Easy Rate Dual Sensor
Easy Rate Sensor Feedthroughs
Easy Rate Single Sensor
Elbow 45° - Stainless Steel ISO-KF
Elbow 90° - Aluminum ISO-KF
Elbow 90° - Stainless Steel 304L
Elbow 90° - Stainless Steel ISO-K
Elbow 90° - Stainless Steel ISO-KF
External Centering Ring Aluminium
FLUE-Mate
FPM Seal CF
FPM Seal with Support Ring
FabGuard Controller
FabGuard Explorer Gas Analysis Software
FabGuard Integrated Process Monitor
FabRecover
FabTime
FabTime Dispatch
FabTime Reports
Factory Dashboard
Factory Digital Twin
Factory Scheduler
Fault Detection and Classification
Flange With Tube - Stainless Steel ISO-K
Flange With Tube - Steel ISO-K
Flange with Tube Medium - Stainless Steel 304
Flange with Tube Medium - Stainless Steel 316L
Flange with Tube Rotatable Stainless Steel 304L
Flange with Tube Stainless Steel 304L
Flange with Tube, Long - Stainless Steel 316L
Flange with Tube, Long - Steel
Flange with Tube, Long- Stainless Steel 304
Flange with Tube, Short - Stainless Steel 316L
Flange with Tube, Short - Steel
Flange with Tube, short - Stainless Steel 304
Flexible Metal Hose CF
Forming Gas Charging Kit
Front Load Dual Sensor
Front Load Single Sensor
GAS-Mate
GAS-Mate
GAS-Mate (discontinued)
Glass Tube Connection ISO-KF
Guardian
HAPSITE CDT
HAPSITE ER
HAPSITE Service Module
HLD5000 (discontinued)
HLD6000
HPG400
HVPS/SC (discontinued)
Hexagonal Bolts with Duo Nuts
Hexagonal Bolts with Nuts
Hexagonal Bolts without Nuts
High Current Feedthrough DN40 ISO-KF
High Temperature Lubricant
Hose Adaptor 90°
Hose Adaptor for Ruber Hose - Aluminum
Hose Adaptor for Ruber Hose - Stainless Steel
Hose Clamp
Hose Clip Clamping Ring
Hose Connection ISO-KF
I-Tip
I-Tip
I-Tip
IC-6000® Thin Film Deposition Controller (discontinued)
IC/4 & IC/4 Plus Thin Film Deposition Controllers
IC/5 Thin Film Deposition Controller (discontinued)
IC/6 Thin Film Deposition Controller
IE414, IE514
ILS500 (discontinued)
IM540
IMM-100
IMM-200
IQM-233
IRC081
IRG080
IRwin
ISH2000 (discontinued)
ISO-K Bellows
ISO-K Intermediate Piece
ISO-K Metal Hose
ISO-K Protective Lids
ISO-K Reducer
ISO-KF Bellows
Indium Seal
Intermediate Piece - Aluminum ISO-KF
Intermediate Piece - Stainless Steel ISO-KF
Intermediate Piece CF
Intermediate Piece Insulated
LDM150
LDS3000
LDS3000 AQ
LDS3000 AQ
Linear Motion Feedthroughs CF
Liquid Feedthroughs ISO-KF-CF
MAG050 MAG060 MAG070
MAG084
MAG470
MPG40x
MSO
Maintenance Optimizer
Maxtek
Measurement Flange - Aluminium
Measurement Flange - Stainless Steel
Metal Hose Flexible
Metal Hose High Flexible
Metal-Ceramic-Connections-2kV-to-10kV
Micro GC Fusion
Mobile Cart Transpector CPM
Modul1000
Multipoint Refrigerant Monitors
MxG50x
NextMove
O-Ring
O-Ring CR
O-Ring CR / FPM ISO-K
O-Ring FPM
OPG550
OPG550
PBR 260
PCG55x
PEG050
PEG100
PGD500
PGD500
PGE050
PGE05x
PGE30x
PGE500
PPG550
PPG570
PROTEC® P3000(XL)
PSG01x
PSG05x
PSG0xx
PSG55x
PSG5xx
PVC Hose
PVC Hose Without Flanges ISO-KF
Perc-Mate (discontinued)
Pernicka 700H (discontinued)
Pilot Plus Vacuum Gauge
Protective Lids
Protective Lids ISO-KF
Q-pod™ Thin Film Deposition Monitor (discontinued)
QCM Sensor Feedthroughs
QMG 700
QS5 Vacuum Pump
Quantus HP100
Quantus LP100
RC1000
RSH-600 Rotary Sensor
Rapid Fastening Clamp
Rapid Fastening Clamp
Rapid Fastening Clamp All Metal
Rapid Fastening Clamp, all metal
Reasearch Crystals
Recovery Machines (discontinued)
Reducer - Aluminum ISO-KF
Reducer - Stainless Steel ISO-KF
Reducer CF-F / CF-R - Stainless Steel 304L
Reducing Centering Ring Aluminium
Reducing Centering Ring Stainless Steel 303
Reducing Cross - Aluminum ISO-KF
Reducing Cross - Stainless Steel 304L
Reducing Cross - Stainless Steel ISO-K
Reducing Cross - Stainless Steel ISO-KF
Reducing Flange CF-F / CF-F - Stainless Steel 304L
Reducing Flange CF-F / CF-F - Stainless Steel 316LN
Reducing Tee - Stainless Steel ISO-K
Reducing Tee - Stainless Steel ISO-KF
Rotary Feedthroughs CF
Rotary Feedthroughs ISO-KF ISO-K
Rotary Linear Motion Feedthroughs ISO-KF
Rubber Hose ISO-KF
SEMIQCM CR
SEMIQCM SR
SMART-Spray
SQC-310
SQM-160
SQM-242 and SAM-242 Thin Film Deposition Controller Cards (discontinued)
STM-2
STM/2XM
Sampling-Probe-AP29Eco
Screw-In Flange ISO-KF
Screw-On Flange ISO-KF
Sealing Disc CR
Sealing Disc FPM
Sealing Material
Sens4 MEMS Pirani
Sensistor ILS500 F Leak Detection Filler
Sensistor ISH2000 (discontinued)
Sensistor ISH2000 Hyspeed (discontinued)
Sensistor ISH2000P (discontinued)
Sensistor Sentrac
Sensistor® XRS9012
Sentinel® III EIES Controller (discontinued)
Sentrac Strix
Set of Hexagon Bolts
Set of Stub Screws
Sigma Instruments
Sion RF Detector for Endpoint Control
Sion RF Detector for Plasma Arc Detection
Sleeve With Hose Clamp ISO-KF
Sleeve with Hose Clamp ISO-K
SmartFDC
Sputtering Sensor
Subfab and Facilities Monitoring
Supporting for Aluminum Seal
Sycon Instruments
T-Guard Leak Detection Sensor
T-Guard2
TEK-Check
TEK-Mate
TEK-Mate (discontinued)
TGF10 (discontinued)
TGF11 Tracer Gas Filler
TOI
TPG36x
Team Optimizer
Tee - Aluminum ISO-KF
Tee - Stainless Steel 304L
Tee - Stainless Steel ISO-K
Tee - Stainless Steel ISO-KF
Transpector APX
Transpector APX ALD Single Pressure
Transpector APX Multi-Pressure
Transpector CPM
Transpector MPH
Transpector MPS
Transpector SPS
Transpector XPR 3+
UHV Bakeable Sensor
UL1000 Fab
UL3000 Fab / Fab ULTRA
UL5000 Fab
UL6000 Fab / Fab ULTRA
VGC031
VGC083
VGC094
VGC50x
VGD500
VSA100A
VSA200
VSC150A
VSD200
Vacuum Crystals
Vacuum Gauges (discontinued)
Vacuum Grease Oil
Viewports ISO-CF
Viewports ISO-F
Viewports ISO-K
Viewports ISO-KF
Vortex Dual Refrigerant Recovery Machine
Welding Flange - Stainless Steel ISO-K
Welding Flange - Steel A570 ISO-K
Welding Flange - Steel ISO-K
Welding Flange Rotatable Stainless Steel 304L
Welding Flange Rotatable Stainless Steel 316LN
Welding Flange Stainless Steel 304L
Welding Flange Stainless Steel 316LN
Welding Flange for Gauges
Welding Flange with Tapped Holes Stainless Steel 304L
Wey-TEK HD Wireless Refrigerant Charging Scale
Wey-TEK Pro
Whisper
Whisper (discontinued)
XL3000FLEX
XL3000Flex
XTC Thin Film Deposition Controller (discontinued)
XTC and XTM
XTC/2 & XTC/C Thin Film Deposition Controllers (discontinued)
XTC/3
XTM/2 Thin Film Deposition Monitor (discontinued)
XTM® Thin Film Deposition Monitor (discontinued)
xParts
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Process
- Step 1: Choose your location, the type of service/ support you need. Let us know your product by searching for the product group, product name or part number indicated on your product.
- Step 2: Send us your contact information and detailed request. For phone support contact us directly.
- Step 3: INFICON experts will get in touch with you to coordinate next steps. If you need to send in a product, we provide the RMA number (Return Material Authorization) within 24 hours.
- Step 4: In case of a repair, preventive maintenance etc., we support you on-site/ via phone/ augmented reality or you can return the product to INFICON with the RMA.
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