Vacuum Feedthroughs & More
Rotary Feedthrough
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.
The available flange designs ISO-KF / ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbarl/s. For UHV an all metal designed feedthrough is also available.
Advantages
- Bellow sealed
- All-metal version
- For very demanding vacuum requirements
- 2011/65/EU RoHS compliant
Specifications
FRU016-H
FRU040-N
FRU040-L
| Vacuum connection | DN 16 CF-F | |
| Feedthrough/seal | bellow | |
| Shaft connection | mm | 4 |
| Transferable torque | ||
| Dynamic | N•m | 0.4 |
| Dynamic, at 300 °C | N•m | 0.2 |
| Static | N•m | 0.2 |
| Rotational speed | RPM | 200 |
| At max. torque | RPM | |
| Shaft load vacuum sided | ||
| Radial force | N | 10 |
| Axial force | N | 5 |
| Service life | Revolutions | 1 000 000 |
| Scale division | degree | 10 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Operating temperature | °C | 300 |
| Bakeout temperature | °C | 300 |
| Materials exposed to process media | 304L/1.4306, 304/1.4301, –/2.4360 | |
| Weight | kg | 0.3 |
| Vacuum connection | DN 40 CF-F | |
| Feedthrough/seal | bellow | |
| Shaft connection | mm | 8 |
| Transferable torque | 4 | |
| Dynamic | N•m | 2 |
| Dynamic, at 300 °C | N•m | 3 |
| Static | N•m | 1000 |
| Rotational speed | RPM | 500 |
| At max. torque | RPM | |
| 60 | ||
| Shaft load vacuum sided | 20 | |
| Radial force | N | 2 000 000 |
| Axial force | N | – |
| Service life | Revolutions | 5 x 10-11 |
| Scale division | degree | 1 x 10-10 mbar ... 2 bar |
| Tightness | mbar•L/s | 300 |
| Pressure (absolute) | 300 | |
| Operating temperature | °C | 304L/1.4306, 304/1.4301, –/2.4360 |
| Bakeout temperature | °C | 1.5 |
| Materials exposed to process media | 304L/1.4306, 304/1.4301, –/2.4360 | |
| Weight | kg | 0.3 |
| Vacuum connection | DN 40 CF-F | |
| Feedthrough/seal | bellow | |
| Shaft connection | mm | 12 |
| Transferable torque | 10 | |
| Dynamic | N•m | 2 |
| Dynamic, at 300 °C | N•m | 5 |
| Static | N•m | 500 |
| Rotational speed | RPM | 300 |
| At max. torque | RPM | |
| 100 | ||
| Shaft load vacuum sided | 30 | |
| Radial force | N | 1 000 000 |
| Axial force | N | – |
| Service life | Revolutions | 5 x 10-11 |
| Scale division | degree | 1 x 10-10 mbar ... 2 bar |
| Tightness | mbar•L/s | 300 |
| Pressure (absolute) | 300 | |
| Operating temperature | °C | 304L/1.4306, 304/1.4301, 303/1.4305 |
| Bakeout temperature | °C | 3 |
| Materials exposed to process media | 304L/1.4306, 304/1.4301, –/2.4360 | |
| Weight | kg | 0.3 |
Part Number
| FRU016-H | |
| 214-310 | FRU016-H Rotary feedthrough DN 16 CF-F |
| FRU040-L | |
| 214-314 | FRU040-L Rotary feedthrough DN 40 CF-F |
| FRU040-N | |
| 214-312 | FRU040-N Rotary feedthrough DN 40 CF-F |
