Vacuum Feedthroughs & More

Rotary Feedthrough

Drop-in Options

Revolutionize your vacuum gauge experience with us!

INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.

The available flange designs ISO-KF/ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10^-9 mbar•l/s. For UHV an all metal designed feedthrough is also available.

Advantages

Bellow sealed
All-metal version
For very demanding vacuum requirements
2011/65/EU RoHS compliant

Specifications

FRU016-H

FRU040-N

FRU040-L

Vacuum connection		DN16 ISO-CF-F

Feedthrough/seal		bellow

Shaft connection	mm	4

Transferable torque
Dynamic	Nm	0.4
Dynamic, at 300 °C	Nm	0.2
Static	Nm	0.2

Rotational speed	rpm	200
At max. torque	rpm	─

Shaft load vacuum sided
Radial force	N	10
Axial force	N	5

Service life	Revolutions	1'000'000

Scale division	Degree	10

Tightness	mbar•l/s	5 x 10^-11

Pressure (absolute)		1 x 10^-10 mbar ... 2 bar

Operating temperature	°C	300
Bakeout temperature	°C	300

Materials exposed to process media		stainless steel 304L/1.4306, stainless steel 304/1.4301, –/2.4360

Weight	kg	0.3

Vacuum connection		DN40 ISO-CF-F

Feedthrough/seal		bellow

Shaft connection	mm	8

Transferable torque
Dynamic	Nm	4
Dynamic, at 300 °C	Nm	2
Static	Nm	3

Rotational speed	rpm	1000
At max. torque	rpm	500

Shaft load vacuum sided
Radial force	N	60
Axial force	N	20

Service life	Revolutions	2'000'000

Scale division	Degree	─

Tightness	mbar•l/s	5 x 10^-11

Pressure (absolute)		1 x 10^-10 mbar ... 2 bar

Operating temperature	°C	300
Bakeout temperature	°C	300

Materials exposed to process media		stainless steel 304L/1.4306, stainless steel 304/1.4301

Weight	kg	1.5

Vacuum connection		DN40 ISO-CF-F

Feedthrough/seal		bellow

Shaft connection	mm	12

Transferable torque
Dynamic	Nm	10
Dynamic, at 300 °C	Nm	2
Static	Nm	5

Rotational speed	rpm	500
At max. torque	rpm	300

Shaft load vacuum sided
Radial force	N	100
Axial force	N	30

Service life	Revolutions	1'000'000

Scale division	Degree	─

Tightness	mbar•l/s	5 x 10^-11

Pressure (absolute)		1 x 10^-10 mbar ... 2 bar

Operating temperature	°C	300
Bakeout temperature	°C	300

Materials exposed to process media		stainless steel 304L/1.4306, stainless steel 304/1.4301, stainless steel 303/1.4305

Weight	kg	3.0

Download full specifications

Part Number

Part Number	Description

214-310	Rotary feedthrough, FRU016-H, DN16 ISO-CF-F

214-312	Rotary feedthrough, FRU040-N, DN40 ISO-CF-F

214-314	Rotary feedthrough, FRU040-L, DN40 ISO-CF-F