Vacuum Feedthroughs & More
Linear Motion Feedthrough
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Revolutionize your vacuum gauge experience with us!
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.
The available flange designs ISO-KF / ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbarl/s. For UHV an all metal designed feedthrough is also available.
Advantages
- With bellows for more demanding vacuum requirements
- Direct push and pull actuation
- High accuracy adjustment using micrometer screw
- 2011/65/EU RoHS compliant
Specifications
FPU016-H
FPU040-H
FPU016-Z
FPU040-Z
| Type | FPU016-H | |
| Vacuum connection | DN 16 CF-R | |
| Feedthrough/seal | bellow | |
| Shaft connection | M4x16mm | |
| Actuator | manual | |
| Travel | mm | 25 |
| Travel per revolution | mm | |
| Scale division | mm | 5 |
| Shaft load | ||
| Radial force at max. | N | 20 |
| Axial force vacuum | N | 85 |
| Axial force against atm | N | 100 |
| Torsion torque | N•m | 0.2 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Bakeout temperature | ||
| Feedtrough | °C | 300 |
| Micrometer screw | °C | |
| Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
| Weight | kg | 0.15 |
| Vacuum connection | DN 40 CF-R | |
| Feedthrough/seal | bellow | |
| Shaft connection | M6x10mm, Ø10mm | |
| Actuator | manual | |
| Travel | mm | 50 |
| Travel per revolution | mm | |
| Scale division | mm | 10 |
| Shaft load | ||
| Radial force at max. | N | 100 |
| Axial force vacuum | N | 140 |
| Axial force against atm | N | 200 |
| Torsion torque | N•m | 0.5 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Bakeout temperature | ||
| Feedtrough | °C | 300 |
| Micrometer screw | °C | |
| Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
| Weight | kg | 0.75 |
| Vacuum connection | DN 16 CF-R | |
| Feedthrough/seal | bellow | |
| Shaft connection | M4x16mm | |
| Actuator | micrometer screw | |
| Travel | mm | 20 |
| Travel per revolution | mm | 0.5 |
| Scale division | mm | 0.01 |
| Shaft load | ||
| Radial force at max. | N | 20 |
| Axial force vacuum | N | 185 |
| Axial force against atm | N | 200 |
| Torsion torque | N•m | 0.2 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Bakeout temperature | ||
| Feedtrough | °C | 300 |
| Micrometer screw | °C | 100 |
| Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
| Weight | kg | 0.25 |
| Vacuum connection | DN 40 CF-R | |
| Feedthrough/seal | bellow | |
| Shaft connection | M6x10mm, Ø10mm | |
| Actuator | micrometer screw | |
| Travel | mm | 50 |
| Travel per revolution | mm | 1 |
| Scale division | mm | 0.005 |
| Shaft load | ||
| Radial force at max. | N | 100 |
| Axial force vacuum | N | 440 |
| Axial force against atm | N | 500 |
| Torsion torque | N•m | 0.5 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Bakeout temperature | ||
| Feedtrough | °C | 300 |
| Micrometer screw | °C | 100 |
| Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
| Weight | kg | 1 |
Part Number
| FPU016-H | |
| 214-330 | FPU016-H Linear feedthrough DN 16 CF-R |
| FPU016-Z | |
| 214-334 | FPU016-Z Linear feedthrough DN 16 CF-R |
| FPU040-H | |
| 214-332 | FPU040-H Linear feedthrough DN 40 CF-R |
| FPU040-Z | |
| 214-336 | FPU040-Z Linear feedthrough DN 40 CF-R |
