Vacuum Feedthroughs & More

Linear Motion Feedthrough

Drop-in Options

Revolutionize your vacuum gauge experience with us!

INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.

The available flange designs ISO-KF/ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10^-9 mbar•l/s. For UHV an all metal designed feedthrough is also available.

Advantages

With bellows for more demanding vacuum requirements
Direct push and pull actuation
High accuracy adjustment using micrometer screw
2011/65/EU RoHS compliant

Specifications

FPU016-H

FPU040-H

FPU016-Z

FPU040-Z

Vacuum connection		DN16 ISO-CF-R

Feedthrough/seal		bellow

Shaft connection		M4x16 mm

Actuator		manual

Travel	mm	25
Travel per revolution	mm

Scale division	mm	5

Shaft load
Radial force at max.	N	20
Axial force vacuum	N	85
Axial force against atm	N	100
Torsion torque	Nm	0.2

Tightness	mbar•l/s	5 × 10^-11

Pressure (absolute)		1 × 10^-10 mbar...2 bar

Bakeout temperature
Feedthrough	°C	300
Micrometer screw	°C

Materials exposed to process media		stainless steel 304L/1.4306, stainless steel 316Ti/1.4571

Weight	kg	0.15

Vacuum connection		DN40 ISO-CF-R

Feedthrough/seal		bellow

Shaft connection		M6x10 mm, Ø10 mm

Actuator		manual

Travel	mm	50
Travel per revolution	mm

Scale division	mm	10

Shaft load
Radial force at max.	N	100
Axial force vacuum	N	140
Axial force against atm	N	200
Torsion torque	Nm	0.5

Tightness	mbar•l/s	5 × 10^-11

Pressure (absolute)		1 × 10^-10 mbar...2 bar

Bakeout temperature
Feedthrough	°C	300
Micrometer screw	°C

Materials exposed to process media		stainless steel 304L/1.4306, stainless steel 316Ti/1.4571

Weight	kg	0.75

Vacuum connection		DN16 ISO-CF-R

Feedthrough/seal		bellow

Shaft connection		M4x16 mm

Actuator		micrometer screw

Travel	mm	20
Travel per revolution	mm	0.5

Scale division	mm	0.01

Shaft load
Radial force at max.	N	20
Axial force vacuum	N	185
Axial force against atm	N	200
Torsion torque	Nm	0.2

Tightness	mbar•l/s	5 × 10^-11

Pressure (absolute)		1 × 10^-10 mbar...2 bar

Bakeout temperature
Feedthrough	°C	300
Micrometer screw	°C	100

Materials exposed to process media		stainless steel 304L/1.4306, stainless steel 316Ti/1.4571

Weight	kg	0.25

Vacuum connection		DN40 ISO-CF-R

Feedthrough/seal		bellow

Shaft connection		M6x10mm, Ø10 mm

Actuator		micrometer screw

Travel	mm	50
Travel per revolution	mm	1

Scale division	mm	0.005

Shaft load
Radial force at max.	N	100
Axial force vacuum	N	440
Axial force against atm	N	500
Torsion torque	Nm	0.5

Tightness	mbar•l/s	5 × 10^-11

Pressure (absolute)		1 × 10^-10 mbar...2 bar

Bakeout temperature
Feedthrough	°C	300
Micrometer screw	°C	100

Materials exposed to process media		stainless steel 304L/1.4306, stainless steel 316Ti/1.4571

Weight	kg	1

Download full specifications

Part Number

Part Number	Description

214-330	Linear Motion Feedthrough, FPU016-H, DN16 ISO-CF-R

214-332	Linear Motion Feedthrough, FPU040-H, DN40 ISO-CF-R

214-334	Linear Motion Feedthrough, FPU016-Z, DN16 ISO-CF-R

214-336	Linear Motion Feedthrough, FPU040-Z, DN40 ISO-CF-R