RSH-800 Rotary Sensor
Continuous deposition monitoring that maximizes uptime for the most demanding applications.
Extended PVD processes demand equipment that can remain stable, accurate, and reliable through every minute of operation. Unstable rate control can cost yield, uniformity, and valuable production time.
The INFICON RSH‑800 rotary sensor head is designed for long deposition runs that must finish without interruption. Built for continuous monitoring in challenging environments, it helps demanding processes run from start to finish with stability and consistency.
Engineered for Demanding Processes
Extended PVD runs can push equipment to the limit. Heat, thick coatings, precision multilayer coatings, and long cycle times all require dependable monitoring that doesn’t falter under pressure.
The RSH‑800 is designed with advanced six-crystal technology to perform steadily through demanding conditions. Its water‑cooled, thermally shielded housing maintains stability up to 300 degrees Celsius, helping ensure measurements remain accurate throughout the full deposition run.
Maintains Stable Monitoring
Reliable thickness measurement is essential for uniform films and predictable performance. With technology designed to keep deposition rate stable throughout long coating runs, the RSH‑800 supports a consistent, uninterrupted signal even in applications where temperature is changing and deposition thickness is continuously increasing.
A thermally shielded housing helps to eliminate thermal shock, helping maintain accuracy across the entire process.
Built for Fast Maintenance and High Uptime
The RSH‑800 helps keep operations moving with a design that enables quick, on-site maintenance. Crystal replacement is straightforward, aided by packaging that simplifies handling during installation.
Pneumatic indexing offers smooth crystal advancement, while integrated feedback options make it simple for systems to track crystal position.
Advantages at a Glance
- Improved yield and film accuracy supported by high‑quality engineering
- Greater production efficiency through extended uptime
- Enhanced throughput with fast crystal exchange
- Better film optimization with position feedback
- Time savings through easy on‑site handling and installation
- Access to worldwide application expertise for process optimization
Flexible Configurations for Chamber Integration
Every vacuum system has its own geometry and constraints. The RSH‑800 adapts easily through multiple mounting options, including flathead configurations for top‑mount installations using an O‑ring feedthrough or CF63 flange. Adjustable flange accessories are available to set the sensor exactly where it’s needed inside the chamber.
Specifications
| Number of crystals | Six |
| Crystal size | 14 mm (0.550 in.) diameter |
| Installation aperture | 50.8 mm (2.0 in.) diameter |
| Power requirement | 24 V (dc) Solenoid valve 21.6–26.4 V (dc), 40 mA |
| 115 V (ac) Solenoid valve 90–132 V (ac), 36/32 mA rms (50/60 Hz) | |
| Crystal switching method | Air Actuated @ 55 psi (4 kg/cm2) regulated |
| Cooling method | Water-cooled @ 5 L/m at 2 kg/cm2 (28 psi) (Do not allow to freeze) |
| Air and water connections | One 6 mm (0.25 in.) quick connect for air, two 1/8 in. compression fittings for water |
| Maximum bakeout temperature without water | 130°C |
| Operating temperature | 300°C max with water cooling and stainless-steel head cover |
| Weight | 3.8 kg (8.5 lb.), varies with overall length |
| Materials | 304 stainless steel, PEEK, beryllium nickel |
Spare Parts
| Part Number | Description |
| 784-553-G1S | Spring Retainer Assembly – Flat |
| TBD | 24 V (dc) Solenoid Valve Assembly |
| TBD | 115 V (ac) Solenoid Valve Assembly |
| 784-544-G1S | Crystal Retainer Assembly, Flat |
| 070-2266S | Retaining Screw for Flat Crystal Retainer |
| 784-501-P1S | Crystal Holder, Flat |
| 784-545-P1S | Stainless Steel Cover |
| 784-554-G1S | Signal Support Assembly |
| 784-555-G1S | Spring Retainer Contact Kit – Flat (set of six) |
| 784-524-P1S | Spring Retainer Contact |
| 784-552-G1S | Spring Contact for Crystal Retainer Assembly |
| 051-2558S | 7-pin Male Connector |
| 070-2312S | Shaft Bearing (in-vacuum) |
| 070-2315S | Shaft Bearing (atmosphere) |
| TBD | Shaft & Microdot 6mm DIA O-ring |
| 784-542-P1S | 200 mm (7.9 in.) Signal Wire Assembly |
| 784-542-P2S | 350 mm (13.8 in.) Signal Wire Assembly |
| 784-542-P3S | 450 mm (17.7 in.) Signal Wire Assembly |
| 784-542-P4S | 540 mm (21.3 in.) Signal Wire Assembly |
| 784-542-P5S | 650 mm (25.6 in.) Signal Wire Assembly |
| 784-506-G1S | Resistor Grid |
| 059-0857S | Actuator Air Fittings |
| 059-0856S | Solenoid Air Fittings |
| 069-0201S | 6 mm Air Tubing |
| TBD | Water Fittings |
| TBD | Adjustable Flange O-ring |
| 784-556-G1S | Microswitch Wire Harness Assembly |
| Part Number | Description |
| 784-600-G1S | Adjustable flange, round |
| 784-600-G2S | Adjustable flange, CF63 |
