Mass Spectrometers

QMG 700

Exceeding Detection Limits with Superior Stability and Refined Resolution

QMG700

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Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
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Gemini™ MxG5xx
Gemini™ MAG500
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Rapid advancements in semiconductor manufacturing technology rely on swift and dependable gas analysis solutions. In the fab or in the lab, select the INFICON QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation. The QMG 700 provides unparalleled performance and adaptability in a modular design. Enhance your competitive edge with the QMG 700, and achieve a superior level of measurement capability.

Select from a wide range of ion source, mass filter, and RF power supply options, to tailor your QMG 700 to specific applications. The QMG 700 boasts more than nine decades of dynamic range and ppb detection limits, making it the ideal instrument for ultra high vacuum measurements. QMG 700 provides unit resolution across its entire mass range, and even higher resolution for low masses. The instrument is a superb option for the most challenging measurements, including isotope analyses, such as helium and deuterium separation. Control your process with the QMG 700 and rely upon its superior long-term stability to protect critical measurements.

More than forty years of analytical mass spectrometry excellence at INFICON ensure the QMG 700 is the right choice for your next gas analysis investment. For consistent accuracy and precise results, you can rely on the INFICON QMG 700 and our worldwide applications expertise.

Features

  • Mass range options from 1-512 amu
  • More than nine decades of dynamic range
  • Extremely fast measurement speeds: 0.125 ms/amu
  • MDPP < 10E-16 mbar
  • High resolution across entire mass range: Masses 1, 2, and 3 clearly separable in ppb range
  • Multiple different ion source options
  • Discrete or continuous dynode electron multiplier options
  • IO option: 8 analog inputs/outputs and 32 digital inputs/outputs
  • Powerful software with flexible and user friendly interface

Typical Applications

  • Gas discharge mass spectrometry
  • End point detection
  • Deposition material monitoring
  • Secondary ion mass spectrometry

Specifications

QMA 400
QMA 410
QMA 430
Mass Range1-512 amu (1)
Sensor Length441.5 mm
Rod Diameter8 mm
Rod MaterialMolybdenum
FlangeDN 63 CF-F
Detector TypeFaraday/SEV 217
Max. Operating Pressure (FC)1 E-4 mbar
Max. Operating Pressure (EM)1 E-5 mbar
Sensitivity5 E-4 A/mbar
Minimum Detectable Partial Pressure1 E-15 mbar
Resolution (adjustable)0.3 - 7 amu
Partial Pressure Ratio< 0.5 ppb
Max. Operating Temp. Sensor150 °C
Max. Bakeout Temp.23.02.2023
Max. Operating Temp. Electronics40 °C
Measurement Speed0.125 ms - 60 s/amu
Power Supply100 - 240 VAC

 

(1) QMA 400 is available for mass ranges: 1-512 amu.
QMA 400 specifications based upon 512 amu mass range, cross beam ion source system configuration

(2) QMA 410 is available for mass ranges: 1-128 amu.
QMA 410 specifications based upon 128 amu mass range, cross beam ion source system configuration
Mass Range1-340 amu (2)
Sensor Length548 mm
Rod Diameter16 mm
Rod MaterialMolybdenum
FlangeDN 100 CF-F
Detector TypeFaraday/SEV 217
Max. Operating Pressure (FC)1 E-4 mbar
Max. Operating Pressure (EM)1 E-5 mbar
Sensitivity1 E -3 A/mbar
Minimum Detectable Partial Pressure5 E-16 mbar
Resolution (adjustable)0.2 - 2.2 amu
Partial Pressure Ratio< 0.5 ppb
Max. Operating Temp. Sensor150 °C
Max. Bakeout Temp.400 °C
Max. Operating Temp. Electronics40 °C
Measurement Speed0.125 ms - 60 s/amu
Power Supply100 - 240 VAC

 

(1) QMA 400 is available for mass ranges: 1-512 amu.
QMA 400 specifications based upon 512 amu mass range, cross beam ion source system configuration

(2) QMA 410 is available for mass ranges: 1-128 amu.
QMA 410 specifications based upon 128 amu mass range, cross beam ion source system configuration
Mass Range1-300 amu
Sensor Length441.5 mm
Rod Diameter8 mm
Rod MaterialStainless Steel
FlangeDN 63 CF-F
Detector TypeFaraday/SEV 217
Max. Operating Pressure (FC)1 E-4 mbar
Max. Operating Pressure (EM)1 E-5 mbar
Sensitivity2 E-4 A/mbar
Minimum Detectable Partial Pressure1 E-15 mbar
Resolution (adjustable)0.3 - 7 amu
Partial Pressure Ratio< 0.5 ppb
Max. Operating Temp. Sensor150 °C
Max. Bakeout Temp.400 °C
Max. Operating Temp. Electronics40 °C
Measurement Speed0.125 ms - 60 s/amu
Power Supply100 - 240 VAC

 

(1) QMA 400 is available for mass ranges: 1-512 amu.
QMA 400 specifications based upon 512 amu mass range, cross beam ion source system configuration

(2) QMA 410 is available for mass ranges: 1-128 amu.
QMA 410 specifications based upon 128 amu mass range, cross beam ion source system configuration

Part Number

QMA 400
QMA 410
QMA 430
490-715QMA 400 with Grid Ion Source
450-119Deckplatte kpl. DMM spez.
490-601QMA 400 for PPM 422 standard
490-700QMA 400 with Axial Ion Source
490-701QMA 400 with Crossbeam
490-702QMA 400, SEM 217, Crossbeam, Yt
490-810QMA 410 with Axial Ion Source
490-812QMA 410,16mm Mo,217, W, CB-GT
490-817QMA 410, SEM 217, crossbeam, Yt
490-821QMA 410 Quadrup.-Analysator
490-830QMA 410 mit CB-IQ mit Magn.,SEV218
490-901QMA 430 mit CB-IQ, Faraday
490-910QMA 430 with Axial-IQ, 90° SEV217
490-913QMA 430 with Grid Ion Source
490-914QMA 430 grid Ion Source, vac.-annealed
490-916QMA 430, CB-IQ without SEV217
490-917QMA 430 with CB Ion source, Gas Tight
490-918QMA 430, CB Ion Source without SEV217
490-943QMA 430, SEM 217, Crossbeam, YT
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