New FabGuard Integrates and Analyzes Process Data to Maximize Productivity

FabGuard Sensor Integration and Analysis System automatically captures, organizes, analyzes and stores valuable data, both from INFICON sensors and the built-in tool sensors used for proper operation and makes the data available to users through a simple, consistent interface. These sophisticated and robust analyses reliably detect endpoints and faults, while improving process control. If an out-of-spec condition occurs, FabGuard pinpoints the cause and notifies the appropriate person, minimizing downtime. The result is fewer wafers lost to misprocessing and test runs.