FabGuard Sensor Integration and Analysis System
automatically captures, organizes, analyzes and stores valuable data, both from INFICON sensors and the built-in tool sensors used for proper operation and makes the data available to users through a simple, consistent interface. These sophisticated and robust analyses reliably detect endpoints and faults, while improving process control. If an out-of-spec condition occurs, FabGuard pinpoints the cause and notifies the appropriate person, minimizing downtime. The result is fewer wafers lost to misprocessing and test runs.