Introducing Transpector® CPX: Industry-Leading Performance and Reliability

Performance and accuracy are paramount in the semiconductor industry. Many manufacturing processes lack in-situ online process monitoring capabilities, like RGAs, to provide a real-time view of process and chamber conditions. As a result, they're facing unplanned downtime, inconsistent results, and concerns over long-term reliability.

The INFICON Transpector® CPX Residual Gas Analyzer (RGA) is designed specifically to tackle the modern challenges semiconductor manufacturers face. By providing real-time, reliable actionable process and chamber data, tool and process owners can make meaningful decisions to maximize throughput and improve process yields.

With the Transpector CPX, semi fabs no longer have to rely on existing systems that fail to provide the necessary insights. Here are four ways the solution changes the game:

Speed & Sensitivity: With industry-leading measurement speed and sensitivity, Transpector CPX can monitor atomic layer processes, requiring deposition of extremely thin and uniform films, and detect any undesirable variance.
Real-Time Data Accuracy: Automated calibration ensures long-term data reliability, making sure that your process monitoring stays accurate, no matter the environmental changes or variations from tool to tool.
Space-Saving Design: With a 30% reduction in system volume compared to previous generations, the Transpector CPX seamlessly integrates into space-constrained environments without compromising performance.
Flexibility & Versatility: The configurable HexBlock inlet allows for up to three pressure inlets, adapting to various applications, whether you're monitoring a high-pressure process or need flexibility for complex setups.

By integrating in-situ online process monitoring systems like the Transpector CPX, semiconductor manufacturers can ensure more consistent and predictable results, increase operational efficiency, and reduce costly downtime. Take control of your production line, avoid costly mistakes, and stay ahead of the competition.