INFICON Introduces Capacitance Diaphragm Gauge For High-Temperature Processes

The new SKY Ceramic Capacitance Diaphragm Gauge (CDG) is specially suited for etch, CVD and other corrosive semiconductor processes for vacuum measurements of superior accuracy and repeatability. The newest SKY CDGs, 100o C and [160o C, use the INFICON patented ultrapure aluminum oxide ceramic diaphragm which eliminates the weaknesses of conventional metal diaphragms, dramatically improving consistency, corrosion resistance, sensor life, and temperature stability.

Until now, CDGs have used metal diaphragms. But as process pressures lower, the key problems of any metal design - stretching, temperature changes, material imperfections, corrosion - are even more apparent. The SKY alumina ceramic diaphragm does away with these error-causing factors. Since it is more rigid than metal, the alumina ceramic is not deformed by repeated pressure cycling or overpressure. This further decreases zero drift and shortens the time needed for readings to stabilize during each process cycle. In some processes, the stability of this diaphragm may eliminate the need for an isolation valve.

Each SKY ceramic diaphragm is identical for consistent and repeatable process measurement. The manufacture of the SKYc ceramic diaphragm - sandwiching the aluminum oxide between the electrode and the housing, and then kiln firing - ensures that no metal stresses or imperfections interfere with consistency. Not even small temperature changes affect SKY diaphragms, so zero drift that can dramatically impact CDG accuracy is only 0.005% of full scale per oC.

SKY Ceramic Diaphragm Gauge is a virtually corrosion-proof CDG of outstanding mechanical strength, homogenous structure, and thermal stability. It offers dramatically increased performance, full compatibility with existing installations, and costs less than ?conventional? CDGs.

For more information, contact INFICON Inc., Two Technology Place, East Syracuse, NY 13057-9714, +1.315.434.1100, email:,


INFICON is a leading developer, manufacturer and supplier of vacuum instrumentation used for analysis, monitoring, measurement and control in the semiconductor, vacuum coatings, AC/ refrigeration, automotive, and industrial markets. With global headquarters in Syracuse, New York, INFICON is a publicly traded company on the SWX Swiss Exchange and on the Nasdaq National Market under the symbol IFCN. INFICON has manufacturing facilities in the United States and Europe with worldwide offices in the U.S., China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom.

In situ analysis products include FabGuard Sensor Integration & Analysis System, Transpector? quadrupole-based process monitors (mass spectrometers), residual gas analyzers, and other specialized sensors and software for semiconductor and thin film processes. Leak detectors include helium, multi-gas, and refrigerant for testing vacuum integrity and for quality control. Pressure measurement products include a complete line of vacuum gauges for total pressure measurement, featuring Sky Ceramic Capacitance Diaphragm Gauges. Plasma cleaning equipment includes LFC Plasma Cleaners for preparation of sensitive surfaces in semiconductor manufacturing. Vacuum components include valves, fittings and feedthroughs used for system engineering.

For more information about INFICON and its products, please visit the Company's web site at
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