INFICON Announces Expansion of Combination Vacuum Gauge Line with TripleGauge for Semiconductor and Industrial Coating Applications

Three Technologies in One Compact Gauge Reduces Cost and Complexity of Process and Base Pressure Measurement

Syracuse, NY - 23 June 2003: INFICON Holding AG (SWX Swiss Exchange and NASDAQ: IFCN), a leading provider of vacuum instrumentation, critical sensor technologies, and process control products for analysis, measurement and control of semiconductor and other advanced processes, announces the expansion of the technology-proven Combination Vacuum Gauge line to include the TripleGauge Bayard-Alpert Capacitance Diaphragm Gauge. Designed to take the place of three sensors (hot ion, convection-enhanced Pirani, and vacuum switch), the unique TripleGauge reduces the complexity of installation, set-up, and vacuum measurement on the semiconductor tool for processing and transfer chambers.

The TripleGauge BCG450 combines the advantages of three technologies in a single, economical package to measure process and base pressures from 3.75 x 10 -10 to 1125 Torr. Above 10 Torr, the TripleGauge BCG450 measures gas-type-independent and solves venting problems with different gas types such as argon or helium. The integrated Pirani sensor protects the hot ion filament from burn-out and contamination by automatically switching emission off at high pressures.

For more information, contact INFICON, Two Technology Place, East Syracuse, NY 13057-9714, +1.315.434.1100, email:,

INFICON is a leading developer, manufacturer and supplier of innovative vacuum instrumentation, critical sensor technologies, and process control software for the semiconductor and related industries. These analysis, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media and precision optics. INFICON also provides essential instrumentation for gas leak detection and toxic chemical analysis to the air conditioning/refrigeration, emergency response and industrial hygiene markets. Headquartered in Syracuse, New York, INFICON has manufacturing facilities in the United States and Europe and worldwide offices in the U.S., China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom. For more information about INFICON and its products, please visit the Company's website at

We require your consent for video content
More Information