Semiconductor and vacuum equipment is continuously checked by rate-of-rise tests during operations. If a leak is detected during this integral leakage test, it is often not easy to determine which of the many connections, feedthroughs, welds and valves are causing the leak. For leak detection, the UL6000 Fab PLUS is connected to the chamber and a helium spray test is performed to locate the potential leaks. If helium penetrates the equipment’s vacuum at a spraying position, it is definite that a leak has been found. In order to determine, however, whether this connection is the only leak or whether there are others, a further rate-of-rise test must be carried out as soon as the leak has been fixed. The new UL6000 Fab PLUS saves a great deal of time, as it is able to perform the helium spray method and the rate-of-rise test one immediately after the other. In addition, thanks to the new I∙RISE function, the connected leak detector transfers the pressure increase of the large production chamber volume into its small internal volume – which speeds up the integral test tremendously. The duration of a rate-of-rise test is dependent on the size of the vacuum chamber being tested. The intelligent I∙RISE function accomplishes this integral test in just 10 seconds ensuring extreme time savings, especially in the case of large production equipment volumes.
Besides I∙RISE, the use of extremely efficient pumps is also a reason why the UL6000 Fab series of leak detectors often pay for themselves after a few uses: thanks to the record speed of testing, they reduce production interruptions and downtime, for example during the scheduled maintenance of a tool, to the absolute minimum.
The UL6000 Fab PLUS has been developed for use in the semiconductor, solar cell and flat panel display manufacturing, for glass and plastic foil coating and vacuum systems.
Take a look at the UL6000 Fab PLUS video to find out more, or contact us here.