INFICON News

Learn more about our products and services.

TF_banner_right
Webinars

INFICON Multi-layer Compensation System

Location
Online
Language
English
Speaker
Sheldon Wayman
Duration
15 minutes

About the webinar

Traditionally, optical coaters require costly optical monitors to support high precision physical vapor deposition processes. However, optical coating tool manufacturers do not always provide optical monitors on all of their tools. With no optical monitor, the tool users have to test a substrate from a large batch to verify film thickness. If there was an incorrect layer thickness, the entire batch would be scrapped or reworked, wasting time and money. 

Thin film deposition monitors with quartz crystal microbalance technology have been used for decades to monitor physical vapor deposition, but today’s precision optical coatings demand higher thickness accuracy. The Z-match equation used in most deposition monitors to calculate thickness only takes into account the Z-ratio for the film currently being deposited. In reality, there could be multiple materials on the same crystal with different Z-ratios. This results in a compounding error in the thickness reading as the multi-layer stack grows. For optical processes where there could be hundreds of layers on the same crystal, the thickness error can be significant. 

In order to satisfy this need for higher thickness accuracy, INFICON has patented a new revolutionary technique for determining multi-layer thin film deposition on a piezoelectric crystal and have integrated it into a new deposition controller, INFICON Zevision® IMC300.

More information on our market page

Related webinars

Webinar
How to increase efficiency in vacuum leak testing with I·Zero
50 min
English
More Information
Webinar
Have your process under control with Augent OPG550

Intelligent solution for real-time vacuum gas monitoring

40 min
English
More Information
Webinar
Is Your Pressure under Control?

Pressure Control and Monitoring in SEMI ALD Processes

1 h
English
More Information
Webinar
Optical revolution in vacuum pressure & gas composition measurement

with Augent® OPG550

35 min
English
More Information
Webinar
UL6000 Fab - The ultimate in vacuum leak testing
17 min
English
More Information
Webinar
Thin Film Applications
40 min
English
More Information
Webinar
OLED Crystal Introduction
31 min
English
More Information
Webinar
Thin Film and QCM Basics
30 minutes
English
More Information
We require your consent for video content
More Information