INFICON to Introduce Thin Film Deposition Controller for Maximum Throughput in OLED Applications at SEMICON West

Especially Designed for Continuous Rate Control of Flexible Deposition Sequencing

Syracuse, NY - 23 June 2003: INFICON Holding AG (SWX Swiss Exchange and NASDAQ: IFCN), a leading provider of vacuum instrumentation, critical sensor technologies, and process control products for analysis, measurement and control of semiconductor and other advanced processes, is introducing CygnusTM Thin Film Deposition Controller at SEMICON West, booth 926. Next generation in the line of INFICON market-leading thin film instruments, Cygnus maximizes process capability and flexibility for OLED (Organic Light-Emitting Diode) applications in the production of flat panel displays.

Cygnus Thin Film Deposition Controller is unique in its ability to precisely control the ratios of up to six materials independently, or in any combination, with a rate resolution of .01 Šper second. This accuracy, powered by ModeLock - the patented INFICON quartz crystal measurement technology, is critical to the low-density materials and low deposition rates associated with OLED processes. As substrates are cycled through the system, flexible deposition sequencing allows continuous rate control and saves valuable production time by eliminating the need to reheat source material with every substrate.

Automatic Z-ratio determination, or Auto Z, increases the accuracy of thickness and rate control and eliminates the need for the user to estimate the acoustic impedance (Z) ratio. This is especially important for maintaining thickness and rate accuracy for materials where the Z-ratio is not known.

Extensive logic I/O features provide comprehensive process control integration. Cygnus also offers up to three digital to analog outputs per source: source power, rate, and thickness. The user can identify the true thickness deposited on the substrate from multiple sources through the Cygnus thickness-summing feature. Applications software provides complete programming of one or multiple Cygnus Controllers from a PC, using RS232 or IEEE interface.

For more information, contact INFICON, Two Technology Place, East Syracuse, NY 13057-9714, +1.315.434.1100, email:,

INFICON is a leading developer, manufacturer and supplier of innovative vacuum instrumentation, critical sensor technologies, and process control software for the semiconductor and related industries. These analysis, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media and precision optics. INFICON also provides essential instrumentation for gas leak detection and toxic chemical analysis to the air conditioning/refrigeration, emergency response and industrial hygiene markets. Headquartered in Syracuse, New York, INFICON has manufacturing facilities in the United States and Europe and worldwide offices in the U.S., China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom. For more information about INFICON and its products, please visit the Company's website at

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