Three Technologies in One Compact Gauge Reduce Cost and Complexity for Semiconductor OEMs
Syracuse, New York/Zurich, Switzerland - July 10, 2003 - INFICON Holding AG (SWX Swiss Exchange and NASDAQ: IFCN), a leading manufacturer of vacuum instrumentation and advanced process control software for the semiconductor and related industries, will introduce the TripleGauge Bayard-Alpert Pirani Capacitance Diaphragm Gauge
at SEMICON West 2003, San Francisco.
The INFICON TripleGauge combines the advantages of three sensor technologies in a single, economical package, enabling semiconductor OEMs to measure process and base pressures from 3.75 x 10 -10
to 1125 Torr. The new gauge is designed to take the place of three stand-alone gauges (hot ion, convection-enhanced Pirani, and a vacuum switch). This significantly reduces the complexity of installation, set-up and vacuum measurement on the semiconductor tool for processing and transfer chambers.
"Chipmakers are demanding that semiconductor OEMs produce lower cost and smaller footprint systems, particularly for new 300mm wafer processing," said James Brissenden, president and chief executive officer. "With this expansion of our technology-proven Combination Vacuum Gauge line, OEMs can take greater advantage of the price and performance rewards of INFICON gauges on more chambers of their production tools."
INFICON will exhibit its products and technologies at SEMICON West from July 14 through July 16. Attendees can view the new TripleGauge at the INFICON booth, #926, located in the South Hall of the Moscone Center.About INFICON
INFICON is a leading developer, manufacturer and supplier of innovative vacuum instrumentation, critical sensor technologies, and advanced process control software for the semiconductor and related industries and other industrial applications. These analysis, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media and precision optics. INFICON also provides essential instrumentation for gas leak detection and toxic chemical analysis to the air conditioning/refrigeration, emergency response and industrial hygiene markets. Headquartered in Syracuse, New York, INFICON has world-class manufacturing facilities in the United States and Europe and worldwide offices in the U.S., China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom. For more information about INFICON and its products, please visit the Company's website at www.inficon.com