INFICON Introduces FabGuard FDC for Fabwide Fault Detection and Classification

Combines real-time fault detection and classification with powerful tools for fab productivity at cutting-edge levels

Syracuse, NY — July 9, 2007: INFICON FabGuard® FDC combines on-line fault detection and classification (FDC) with powerful tools that allow fab engineers to readily analyze virtually any aspect of process and equipment behavior. FabGuard FDC combines fabwide FDC functionality with tool-specific data analysis to improve process engineering and equipment troubleshooting, reducing unscheduled tool downtime and improving yield.

The FabGuard FDC Expert System Builder enhances traditional SPC-based tool interdiction by giving process and equipment engineers the flexibility to train FabGuard FDC to recognize new problems as they appear and automatically detect them when they appear again. This proactive approach to fault detection provides wafer protection and fault identification not previously available.

FabGuard FDC can be easily scaled from one tool to several hundred for real-time SPC on all wafer process equipment. A single user interface allows engineers to display, sort and analyze tool and process data from every tool with extreme flexibility and ease. FabGuard FDC is the only system designed to integrate multiple types of process sensors in a single platform, automatically controlling all sensors and analyzing complex data.

For more information, contact INFICON, Two Technology Place, East Syracuse, NY 13057-9714, +1.315.434.1100, email:,

INFICON is a leading developer, manufacturer and supplier of innovative instrumentation, critical sensor technologies, and advanced process control software for the semiconductor, vacuum coating, and general vacuum process industries. These analysis, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media and precision optics. INFICON also provides essential instrumentation for gas leak detection to the air conditioning/refrigeration industries and toxic chemical analysis for the emergency response and security markets. INFICON has world-class manufacturing facilities in the United States, Europe and China and worldwide offices in the U.S., China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom. INFICON is a publicly listed company, registered with the Swiss Stock Exchange (SWX). For more information about INFICON and its products, please visit the Company's website at

INFICON Introduces FabGuard FDC for Fabwide Fault Detection and Classification
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