Control de Deposición

SQC-310

Control secuencial o de codeposición de alta precisión

Con una electrónica avanzada, una pantalla mejorada y un precio muy asequible, la serie SQC-310 de INFICON le ofrece funciones que no se encuentran en los controladores de película fina de la competencia. Y puede elegir el modelo ideal para su aplicación: deposición secuencial (SQC-310) o codeposición (SQC-310C).

Características

Brillante pantalla LCD en color - disponible en inglés o chino
RS-232 y USB estándar (RS-232 y Ethernet opcionales)
Fácil configuración y funcionamiento con un menú de "Configuración rápida", 6 botones sensibles al contexto y un cómodo mando de ajuste de parámetros
Programa Windows® para desarrollar, probar y descargar procesos, y para registrar los datos del instrumento en su PC para el análisis de procesos y el control de calidad
Control preciso del proceso, especialmente para tasas de deposición bajas, con una resolución de ±0,03 Hz a 10 lecturas/segundo
Capacidad de almacenamiento de hasta 100 procesos, 1.000 capas, 50 películas
Monitorización del material fuente con un único sensor o con varios sensores para proporcionar una monitorización precisa de la distribución de la fuente

Especificaciones

SQC-310

SQC-310C

Measurement
QCM Inputs	QCM Inputs	2 (4 optional)
Measurement Frequency Range	Measurement Frequency Range	Adjustable:
		1.0 MHz minimum
		6.5 MHz maximum
Frequency Resolution (1)	Frequency Resolution (1)	± 0.012 Hz
Thickness and rate resolution/measurement (2)	Thickness and rate resolution/measurement (2)	±0.015 Å
Frequency Stability	Frequency Stability	± 2 ppm total, 0 to 50C
Measurement Interval	Measurement Interval	0.10 to 1.0 s (adjustable)
Rate Display	Rate Display	0.01 Å/sec

Control
Storage	Storage	100 processes, 1000 layers, 50 films
Control Outputs	Control Outputs	2 (4 optional)
Output Signal	Output Signal	± 0 to 10 VDC, 15 bits
Digital Inputs/Relays	Digital Inputs/Relays	8/8 (16/16 optional)
Digital Inputs	Digital Inputs	5 VDC non-isolated
Relays	Relays	SPST Form 1A, 30V, 2A max
Interface(s)	Interface(s)	Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control	Remote Power Control	Optional (IPN 782-900-017)

Display
Type	Type	1/4 VGA 320 x 240 active matrix color LCD
Graphs	Graphs	Rate, deviation, power or full screen numeric

General
Power	Power	100-240 VAC, 50/60 Hz, 25W
Compliance	Compliance	CE, RoHS
Windows® Software	Windows® Software	Included
Housing / Mounting	Housing / Mounting	5 1/4” half-rack

(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval

Measurement
QCM Inputs	QCM Inputs	4
Measurement Frequency Range	Measurement Frequency Range	Adjustable:
		1.0 MHz minimum
		6.5 MHz maximum
Frequency Resolution (1)	Frequency Resolution (1)	± 0.012 Hz
Thickness and rate resolution/measurement (2)	Thickness and rate resolution/measurement (2)	±0.015 Å
Frequency Stability	Frequency Stability	± 2 ppm total, 0 to 50C
Measurement Interval	Measurement Interval	0.10 to 1.0 s (adjustable)
Rate Display	Rate Display	0.01 Å/sec

Control
Storage	Storage	100 processes, 1000 layers, 50 films
Control Outputs	Control Outputs	4
Output Signal	Output Signal	± 0 to 10 VDC, 15 bits
Digital Inputs/Relays	Digital Inputs/Relays	16/16
Digital Inputs	Digital Inputs	5 VDC non-isolated
Relays	Relays	SPST Form 1A, 30V, 2A max
Interface(s)	Interface(s)	Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control	Remote Power Control	Optional (IPN 782-900-017)

Display
Type	Type	1/4 VGA 320 x 240 active matrix color LCD
Graphs	Graphs	Rate, deviation, power or full screen numeric

General
Power	Power	100-240 VAC, 50/60 Hz, 25 W
Compliance	Compliance	CE, RoHS
Windows® Software	Windows® Software	Included
Housing / Mounting	Housing / Mounting	5 1/4” half-rack

(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval

Accesorios

Accesorios y Piezas de repuesto

Nombre	Descripción
Front Load Single Sensor	Front Load Single Sensor
Front Load Dual Sensor	Front Load Dual Sensor
Cool Drawer Single Sensor	Cool Drawer Single Sensor
Cool Drawer Dual Sensor	Cool Drawer Dual Sensor
Low Profile Single Sensor	Low Profile Single Sensor
Easy Rate Dual Sensor	Easy Rate Dual Sensor
Low Profile Dual Sensor	Low Profile Dual Sensor
UHV Bakeable Sensor	UHV Bakeable Sensor
Sputtering Sensor	Sputtering Sensor
CrystalSix® Sensor	CrystalSix® Sensor
Crystal 12® Sensor	Crystal 12® Sensor
Easy Rate Single Sensor	Easy Rate Single Sensor
RSH-600 Rotary Sensor	RSH-600 Rotary Sensor

Número de parte	Descripción
782-900-007	Full Rack Extender - Mounts one SQC-310 or Composer Elite in a 19 in. rack (includes blank-off)
782-900-016	Rack adapter - mounts two SQC-310 instruments in 19 in. rack
782-502-097-G1	Ethernet option card
782-502-096-G2	USB option card
Oscillator kits	(Includes oscillator and cables)
783-500-109-10	3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-25	7.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-50	15.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-75	22.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
Oscillator Only	(No cables included)
783-500-013-G1	OSC-100 oscillator only (no cables)
Cables
782-902-011	15.2 cm (6 in.) BNC cable, male/female
782-902-012-10	3 m (10 ft.) BNC cable, male/male
782-902-012-25	7.6 m (25 ft.) BNC cable, male/male
782-902-012-50	15.2 m (50 ft.) BNC cable, male/male
782-902-012-75	22.8 m (75 ft.) BNC cable, male/male