INFICON Joins SEMATECH to Develop Analysis and Monitoring Solutions for Semiconductor Manufacturing Equipment

ALBANY, N.Y. and SYRACUSE, N.Y. – January 21, 2014 – INFICON, a leading provider of instrumentation, sensor technologies and advanced process control software, has joined SEMATECH to improve wafer processing capabilities and tool utilization across 200 mm and 300 mm semiconductor manufacturing facilities.


As a member of SEMATECH’s Manufacturing Technology Program, INFICON will collaborate with SEMATECH engineers to improve sensors, data analysis and automation processes using INFICON’s FabGuard Sensor Integration and Analysis System. The partnership will further the development of tool-based process control solutions that will improve fab productivity for semiconductor manufacturers.


“We are excited to collaborate with SEMATECH on innovative process analysis development to better understand how semiconductor processing equipment can reach full potential,” said Peter Maier, president of INFICON Inc. “By providing faster, more robust detection of process faults, FabGuard can help prevent the loss of product. This partnership will improve semiconductor equipment and process productivity by enhancing real-time data collection from process tools and sensors, utilizing advanced fault detection, process diagnostics and process completion algorithms.”


FabGuard, a fully automated, real-time early fault detection and analysis system for improving semiconductor equipment and process productivity, is capable of "smart diagnostics." It allows for intelligent integration and analysis routines to better maintain process conditions in semiconductor manufacturing.


The partnership between SEMATECH and INFICON will help solve critical technology challenges, ultimately resulting in manufacturing advancements for the semiconductor industry.


“Sensor integration and data analysis are at the center of prognostic health management (PHM) technology trends," said Sanjay Rajguru, director of Manufacturing at SEMATECH. “We look forward to working closely with INFICON in a collaborative effort to find methods to improve software and monitoring capabilities that will provide substantial process improvements and cost advantages to chip makers.”

INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process control software that enhance productivity and quality in sophisticated industrial vacuum processes. These analyses, measurement and control products are essential for gas leak detection in air conditioning/refrigeration and automotive manufacturing. They are vital to equipment manufacturers and end-users in the complex fabrication of semiconductors and thin film coatings for optics, flat panel displays, solar cells and industrial vacuum coating applications. Other users of our vacuum-based processes include the life sciences, research, aerospace, packaging, heat treatment, laser cutting and many other industrial processes. We also leverage our expertise in vacuum technology to provide unique, toxic chemical analysis products for emergency response, security, and environmental monitoring. INFICON is headquartered in Switzerland and has world-class manufacturing facilities in Europe, the United States and China, as well as subsidiaries in China, Finland, France, Germany, India, Italy, Japan, Korea, Liechtenstein, Singapore, Sweden, Switzerland, Taiwan, the United Kingdom and the United States. INFICON registered shares (IFCN) are listed on the SIX Swiss Exchange. For more information about INFICON and its products, please


For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at


For further information, please contact:
Naomi Kissel-Johns, 315-434-1234

Erica McGill, 518-649-1041 

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