蒸着コントローラー

SQC-310

高精度の連続蒸着または同時蒸着コントロール

ACADEMY

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高度なエレクトロニクスとさらに改良されたディスプレイ、お求めやすい価格という特徴を兼ね備えたINFICONのSQC-310シリーズは、競合他社の薄膜コントローラーにはない機能をお客様へご提供します。連続蒸着用(SQC-310)または同時蒸着用(SQC-310C) からお客様のアプリケーションに最適なモデルを選択する事が出来ます。

特徴

明るいカラーLCDディスプレイ - 英語または中国語対応
標準：RS-232とUSB（オプション：RS-232とイーサネット）
クイックセットアップメニューによる簡単な設定と操作、状況に応じた6つのプッシュボタン、便利なパラメータ設定ノブ
Windows®プログラムにより、プロセスの開発、テスト、ダウンロードが可能、そしてプロセス分析および品質管理のために装置データをＰＣに記録可能。
10回/秒の読み取りで±0.03Hzの分解能を持ち、特にローデポジションレートでの正確なプロセス制御が可能。
100プロセス、1,000レイヤー、50フィルムまで記録出来るストレージ容量
ソース材料を単一センサーまたは複数センサーで監視することにより正確なソース分布モニタリング実施

仕様

SQC-310

SQC-310C

Measurement
QCM Inputs	QCM Inputs	2 (4 optional)
Measurement Frequency Range	Measurement Frequency Range	Adjustable:
		1.0 MHz minimum
		6.5 MHz maximum
Frequency Resolution (1)	Frequency Resolution (1)	± 0.012 Hz
Thickness and rate resolution/measurement (2)	Thickness and rate resolution/measurement (2)	±0.015 Å
Frequency Stability	Frequency Stability	± 2 ppm total, 0 to 50C
Measurement Interval	Measurement Interval	0.10 to 1.0 s (adjustable)
Rate Display	Rate Display	0.01 Å/sec

Control
Storage	Storage	100 processes, 1000 layers, 50 films
Control Outputs	Control Outputs	2 (4 optional)
Output Signal	Output Signal	± 0 to 10 VDC, 15 bits
Digital Inputs/Relays	Digital Inputs/Relays	8/8 (16/16 optional)
Digital Inputs	Digital Inputs	5 VDC non-isolated
Relays	Relays	SPST Form 1A, 30V, 2A max
Interface(s)	Interface(s)	Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control	Remote Power Control	Optional (IPN 782-900-017)

Display
Type	Type	1/4 VGA 320 x 240 active matrix color LCD
Graphs	Graphs	Rate, deviation, power or full screen numeric

General
Power	Power	100-240 VAC, 50/60 Hz, 25W
Compliance	Compliance	CE, RoHS
Windows® Software	Windows® Software	Included
Housing / Mounting	Housing / Mounting	5 1/4” half-rack

(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval

Measurement
QCM Inputs	QCM Inputs	4
Measurement Frequency Range	Measurement Frequency Range	Adjustable:
		1.0 MHz minimum
		6.5 MHz maximum
Frequency Resolution (1)	Frequency Resolution (1)	± 0.012 Hz
Thickness and rate resolution/measurement (2)	Thickness and rate resolution/measurement (2)	±0.015 Å
Frequency Stability	Frequency Stability	± 2 ppm total, 0 to 50C
Measurement Interval	Measurement Interval	0.10 to 1.0 s (adjustable)
Rate Display	Rate Display	0.01 Å/sec

Control
Storage	Storage	100 processes, 1000 layers, 50 films
Control Outputs	Control Outputs	4
Output Signal	Output Signal	± 0 to 10 VDC, 15 bits
Digital Inputs/Relays	Digital Inputs/Relays	16/16
Digital Inputs	Digital Inputs	5 VDC non-isolated
Relays	Relays	SPST Form 1A, 30V, 2A max
Interface(s)	Interface(s)	Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control	Remote Power Control	Optional (IPN 782-900-017)

Display
Type	Type	1/4 VGA 320 x 240 active matrix color LCD
Graphs	Graphs	Rate, deviation, power or full screen numeric

General
Power	Power	100-240 VAC, 50/60 Hz, 25 W
Compliance	Compliance	CE, RoHS
Windows® Software	Windows® Software	Included
Housing / Mounting	Housing / Mounting	5 1/4” half-rack

(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval

アクセサリー

アクセサリーと交換部品

名称	商品説明
Front Load Single Sensor	Front Load Single Sensor
Front Load Dual Sensor	Front Load Dual Sensor
Cool Drawer Single Sensor	Cool Drawer Single Sensor
Cool Drawer Dual Sensor	Cool Drawer Dual Sensor
Easy Rate Single Sensor	Easy Rate Single Sensor
Easy Rate Dual Sensor	Easy Rate Dual Sensor
UHV Bakeable Sensor	UHV Bakeable Sensor
Sputtering Sensor	Sputtering Sensor
CrystalSix® Sensor	CrystalSix® Sensor
Crystal 12® Sensor	Crystal 12® Sensor
RSH-600 Rotary Sensor	RSH-600 Rotary Sensor

品番	商品説明
782-900-007	Full Rack Extender - Mounts one SQC-310 or Composer Elite in a 19 in. rack (includes blank-off)
782-900-016	Rack adapter - mounts two SQC-310 instruments in 19 in. rack
782-502-097-G1	Ethernet option card
782-502-096-G2	USB option card
Oscillator kits	(Includes oscillator and cables)
783-500-109-10	3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-25	7.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-50	15.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-75	22.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
Oscillator Only	(No cables included)
783-500-013-G1	OSC-100 oscillator only (no cables)
Cables
782-902-011	15.2 cm (6 in.) BNC cable, male/female
782-902-012-10	3 m (10 ft.) BNC cable, male/male
782-902-012-25	7.6 m (25 ft.) BNC cable, male/male
782-902-012-50	15.2 m (50 ft.) BNC cable, male/male
782-902-012-75	22.8 m (75 ft.) BNC cable, male/male