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SemiQCM - Semiconductor Manufacturing Solutions
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SemiQCM - Semiconductor Manufacturing Solutions

Ubicación
Online
Idioma
English
Duración
24 min

Description

Discover why you need QCM technology for Semiconductor fabrication and learn what SemiQCM equipment you may need for your application.

This webinar will cover:

  • Potential SemiQCM solutions
  • Proven SemiQCM applications
  • The right SemiQCM tool for the job
  • SemiQCM system components
Webinar
How to increase efficiency in vacuum leak testing with EcoBoost (formerly I·Zero)
50 min
English
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Find the Best Pirani Gauge for Your Vacuum Application
52 min
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Have your process under control with Augent OPG550

Intelligent solution for real-time vacuum gas monitoring

40 min
English
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Factory Optimization - Part I

How to measure your factory performance

50 min
English
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Webinar
Factory Optimization - Part II

How to measure your factory performance

50 min
English
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Webinar
Factory Optimization - Part III

How to measure your factory performance

50 min
English
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Is Your Pressure under Control?
Pressure Control and Monitoring in SEMI ALD Processes
1 h
English
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Optical revolution in vacuum pressure & gas composition measurement
35 min
English
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UL6000 Fab - The ultimate in vacuum leak testing
17 min
English
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Transpector APX

Our new Gas Analyzer. Product introduction, availability, successful implementations of pre-production systems

35 minutes
English
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Protective Atomic Layer Deposition Coatings on complex parts
1 hour
English
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QCM Troubleshooting
30 min
English
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Mastering Vacuum Measurements

A Basic Guide to Capacitive Vacuum Gauges

36 minutes
English
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Webinar
QCMs and Thin Film Processes in Semi

QCM use in the semiconductor industry for processes like ALD, E-beam, resistive source and sputtering.

22 minutes
English
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Webinar
Temperature Compensation for QCMs

Quartz crystal microbalance (QCM) technology has been used for decades to control deposition rate and thickness for the most complex processes seen in the ophthalmic, optical, display, and solar markets. INFICON has recently made a new advancement in QCM technology to address a problem seen across all of these industries related to QCM temperature effects. Thermal shock can cause QCM thickness errors which can decrease yield and increase manufacturing costs if temperature is not accounted for correctly.

Temperature impacts the frequency measurement and can create false mass readings. Thin film deposition controllers currently on the market have no good way of distinguishing frequency shifts related to mass from frequency shifts related to temperature, resulting in thickness errors and poor PID control. This can be detrimental to complex coating processes due to the low deposition rates and incredibly thin layers required. Thermal shocks can occur at any point in a deposition process and can cause unnecessary PID-loop corrections, triggering non-uniform deposition in respect to time. This means that the quality throughout the bulk of the material is inadequate. For very thin films, the thickness termination may not be at the real intended thickness because the process time window is small compared to the time allowed for a QCM to recover from a thermal shock event.

INFICON has patented a new temperature compensation technique for SC-cut crystals to remove the effects of temperature variation on the QCM without the need for additional hardware or custom and expensive sensors.

Please join us for the ‘Temperature Compensation for QCMs’ webinar, hosted by Sheldon Wayman, Product Engineer for INFICON Inc.

20 minutes
English
Más información
Webinar
SMART-Spray, I·BOOST, SPRAY-Check

Smart essentials for intelligent leak detection

33 minutes
English
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Webinar
Introducing Trigon™

A new future proof Hot Ion Gauge generation from INFICON

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Webinar
FabTime®: Improve Fab Cycle Time by Tracking the Right Equipment Reliability Metrics

Most people, when asked, cite equipment downtime as a top contributor to cycle time in their wafer fabs. Downtime impacts cycle time by taking away buffer capacity (driving tools to a steeper part of the operating curve), increasing process time variability (because lots must wait during downtime events), and reducing the available number of qualified tools during a given day or shift. Understanding these effects suggests specific metrics that are helpful for driving cycle time improvement and other metrics that are less useful. In this webinar, Dr. Jennifer Robinson, Cycle Time Evangelist for INFICON, will teach participants to select the best downtime metrics and operating practices for cycle time improvement. The session will include chart examples from the FabTime® reporting module.

11 dic 2024 | 5:00 PM (UTC +2)
60 minutes
English
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