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xParts – Protective Atomic Layer Deposition Coatings on complex parts

Claudio Christoffel
1 hour

In the todays high-tech industries such as the Semiconductor production, the complexity of the processes and the equipment exposure to harsh chemistry is intense. The desire for tool up-time, high yield and good wafers by lowering the cost of ownership is eminent. Through INFICON xParts ALD coatings one can address exactly these challenges.

About the webinar

Our experts Claudio Christoffel and Harald Wildhölzl will show in this webinar following xParts features:

  • High conformity allows to coat highly complex 3D geometries with large aspect ratios
  • Outstanding chemical resistance against harsh chemistries (Fluorine, Chlorine etc.)
  • Sealing pores, cracks and voids in thick but porous coatings (E.g Plasma spray)
  • Reduces AlF3 formation and delimitation
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