증착 컨트롤러

SQC-310

매우 정확한 시퀀스 또는 코드포지션 제어

첨단 전자 장치, 개선된 디스플레이, 매우 합리적인 가격의 INFICON SQC-310 시리즈는 경쟁사의 박막 컨트롤러에서는 찾아볼 수 없는 기능을 제공합니다. 또한 순차 증착(SQC-310) 또는 코드 증착(SQC-310C) 중 용도에 맞는 이상적인 모델을 선택할 수 있습니다.

특징

밝은 컬러 LCD 디스플레이 - 영어 또는 중국어로 제공
표준 RS-232 및 USB(RS-232 및 이더넷 옵션)
"빠른 설정" 메뉴, 상황에 맞는 6개의 푸시 버튼, 편리한 파라미터 설정 노브를 통한 간편한 설정 및 작동
프로세스 개발, 테스트 및 다운로드, 프로세스 분석 및 품질 관리를 위해 계측기 데이터를 PC에 로깅할 수 있는 Windows® 프로그램
초당 10회 판독 시 ±0.03Hz 분해능으로 특히 낮은 증착 속도에서 정확한 공정 제어 가능
최대 100개의 공정, 1,000개의 레이어, 50개의 필름을 위한 저장 용량
단일 센서 또는 여러 센서를 사용하여 정확한 소스 분포 모니터링을 제공하는 소스 재료 모니터링

사양서

SQC-310

SQC-310C

Measurement
QCM Inputs	QCM Inputs	2 (4 optional)
Measurement Frequency Range	Measurement Frequency Range	Adjustable:
		1.0 MHz minimum
		6.5 MHz maximum
Frequency Resolution (1)	Frequency Resolution (1)	± 0.012 Hz
Thickness and rate resolution/measurement (2)	Thickness and rate resolution/measurement (2)	±0.015 Å
Frequency Stability	Frequency Stability	± 2 ppm total, 0 to 50C
Measurement Interval	Measurement Interval	0.10 to 1.0 s (adjustable)
Rate Display	Rate Display	0.01 Å/sec

Control
Storage	Storage	100 processes, 1000 layers, 50 films
Control Outputs	Control Outputs	2 (4 optional)
Output Signal	Output Signal	± 0 to 10 VDC, 15 bits
Digital Inputs/Relays	Digital Inputs/Relays	8/8 (16/16 optional)
Digital Inputs	Digital Inputs	5 VDC non-isolated
Relays	Relays	SPST Form 1A, 30V, 2A max
Interface(s)	Interface(s)	Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control	Remote Power Control	Optional (IPN 782-900-017)

Display
Type	Type	1/4 VGA 320 x 240 active matrix color LCD
Graphs	Graphs	Rate, deviation, power or full screen numeric

General
Power	Power	100-240 VAC, 50/60 Hz, 25W
Compliance	Compliance	CE, RoHS
Windows® Software	Windows® Software	Included
Housing / Mounting	Housing / Mounting	5 1/4” half-rack

(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval

Measurement
QCM Inputs	QCM Inputs	4
Measurement Frequency Range	Measurement Frequency Range	Adjustable:
		1.0 MHz minimum
		6.5 MHz maximum
Frequency Resolution (1)	Frequency Resolution (1)	± 0.012 Hz
Thickness and rate resolution/measurement (2)	Thickness and rate resolution/measurement (2)	±0.015 Å
Frequency Stability	Frequency Stability	± 2 ppm total, 0 to 50C
Measurement Interval	Measurement Interval	0.10 to 1.0 s (adjustable)
Rate Display	Rate Display	0.01 Å/sec

Control
Storage	Storage	100 processes, 1000 layers, 50 films
Control Outputs	Control Outputs	4
Output Signal	Output Signal	± 0 to 10 VDC, 15 bits
Digital Inputs/Relays	Digital Inputs/Relays	16/16
Digital Inputs	Digital Inputs	5 VDC non-isolated
Relays	Relays	SPST Form 1A, 30V, 2A max
Interface(s)	Interface(s)	Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control	Remote Power Control	Optional (IPN 782-900-017)

Display
Type	Type	1/4 VGA 320 x 240 active matrix color LCD
Graphs	Graphs	Rate, deviation, power or full screen numeric

General
Power	Power	100-240 VAC, 50/60 Hz, 25 W
Compliance	Compliance	CE, RoHS
Windows® Software	Windows® Software	Included
Housing / Mounting	Housing / Mounting	5 1/4” half-rack

(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval

악세사리

액세서리 및 교체 부품

이름	설명
Front Load Single Sensor	Front Load Single Sensor
Front Load Dual Sensor	Front Load Dual Sensor
Cool Drawer Single Sensor	Cool Drawer Single Sensor
Cool Drawer Dual Sensor	Cool Drawer Dual Sensor
Low Profile Single Sensor	Low Profile Single Sensor
Easy Rate Dual Sensor	Easy Rate Dual Sensor
Low Profile Dual Sensor	Low Profile Dual Sensor
UHV Bakeable Sensor	UHV Bakeable Sensor
Sputtering Sensor	Sputtering Sensor
CrystalSix® Sensor	CrystalSix® Sensor
Crystal 12® Sensor	Crystal 12® Sensor
Easy Rate Single Sensor	Easy Rate Single Sensor
RSH-600 Rotary Sensor	RSH-600 Rotary Sensor

파트 넘버	설명
782-900-007	Full Rack Extender - Mounts one SQC-310 or Composer Elite in a 19 in. rack (includes blank-off)
782-900-016	Rack adapter - mounts two SQC-310 instruments in 19 in. rack
782-502-097-G1	Ethernet option card
782-502-096-G2	USB option card
Oscillator kits	(Includes oscillator and cables)
783-500-109-10	3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-25	7.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-50	15.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-75	22.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
Oscillator Only	(No cables included)
783-500-013-G1	OSC-100 oscillator only (no cables)
Cables
782-902-011	15.2 cm (6 in.) BNC cable, male/female
782-902-012-10	3 m (10 ft.) BNC cable, male/male
782-902-012-25	7.6 m (25 ft.) BNC cable, male/male
782-902-012-50	15.2 m (50 ft.) BNC cable, male/male
782-902-012-75	22.8 m (75 ft.) BNC cable, male/male