Sensors & Feedthroughs
UHV 베이커블 센서
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICON UHV 베이커블 크리스탈 센서는 입증된 안정성과 내구성을 제공하며 시장의 모든 센서 헤드 중 최고의 열 안정성을 보유하고 있습니다. 304 스테인리스 스틸, 몰리브덴, 인코넬, 니켈 및 알루미나 재료로 만들어진 UHV 베이커블 센서는 최대 450°C의 연속 베이크아웃 온도를 견디도록 설계되었습니다(베이크아웃 전용, 실제 탈착 모니터링에 필요한 물 흐름). 프론트 로드 설계에서는 측면 삽입을 위한 공간이 충분하지 않은 응용 분야에서 크리스탈 홀더를 쉽게 삽입할 수 있습니다.
특징
- 고온 납땜 및 용접 구조
- 최고 450°C 베이크아웃 온도
- 크리스탈 셔터(옵션)
- 전면 장착 크리스탈 홀더
- 쉬운 설치
- CF40 피드스루
- 피드스루에 대한 용접이나 납땜 필요 없음
- 센서/피드스루 조합을 고객이 지정한 길이로 용접할 수 있음
사양서
Bakeable Sensor w/ Shutter
Bakeable Sensor w/out Shutter
| 최대 온도 | 400° C continuous (for bake only; water flow recommended for actual deposition monitoring) |
| 크리스탈 교환 | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange. |
| 워터, 에어 및 동축 라인 | 0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax |
| 최대 온도 | 450°C continuous (for bake only; water flow recommended for actual deposition monitoring) |
| 크리스탈 교환 | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. |
| 워터, 에어 및 동축 라인 | 0.125 in. (3 mm) O.D. water x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax |
악세사리
Accessories
Consumables
| Part Number | Description |
| 750-420-G1 | Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors) |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
Spare Parts
| Part Number | Description |
| 007-007 | Retainer spring (for crystal holder) |
| 007-064 | Ceramic retainer |
| 007-094 | Clamping spring |
| 007-095 | Handle |
| 007-098 | Female Connector (includes ferrules and nut) |
| 007-099 | Bakeable head contact |
| 007-100 | Insulator for BNC |
| 007-103 | Insulator for bakeable head contact |
| 007-104 | BNC Body |
| 007-147 | #4-40 X 3/8 screw |
| 007-155 | Braze assy - 12 in. (30.5 cm) |
| 007-156 | Braze assy - 20 in (50.8 cm) |
| 007-157 | Braze assy - 30 in. (76.2 cm) |
| 007-228 | #4-40 X 5/8 screw |
| 007-267-P2 | Spreader bar |
| 007-268-P1 | Shoulder washer |
| 007-269-P1 | Shoulder washer |
| 008-007 | CRYSTAL SNATCHER |
| 059-0084 | VCR gasket |
| 070-201 | #4 Split lockwasher |
| 084-069-P1 | #4-40 x 3/16 screw |
| 750-018-P3 | Split clamp |
| 750-018-P5 | Split clamp |
| 750-022-G5 | Bellows assembly - 12 in. (30.5 cm) |
| 750-022-G6 | Bellows assembly - 20 in. (50.8 cm) |
| 750-022-G7 | Bellows assembly - 30 in. (76.2 cm) |
| 750-028-G5 | Braze assy with air line - 12 in. (30.5 cm) |
| 750-028-G6 | Braze assy with air line - 20 in. (50.8 cm) |
| 750-028-G7 | Braze assy with air line - 30 in. (76.2 cm) |
| 750-115-P4 | Coupling (installs onto bellows assembly) |
| 750-118-P4 | Actuator support |
| 750-120-G3 | Shaft assembly |
| 750-216-G1 | Shutter assembly (part of shutter module) |
| 750-218-G1 | Cyrstal holder |
