박막 모니터
박막 모니터는 디스플레이, 반도체, 광학 코팅, 페로브스카이트 및 산업용 박막 어플리케이션의 정밀한 공정 제어를 위해 증착 속도와 두께를 실시간으로 측정합니다. 박막 모니터의 고정밀 기술은 일관성, 효율성 및 우수한 필름 품질을 보장합니다.
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Compact deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise
- INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Maximize yield with the best QCM thickness measurement possible
- Single channel rate and thickness monitor without unnecessary added features to compact size and minimize cost
- EtherCAT communications for seamless integration
Compact deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise
- INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Maximize yield with the best QCM thickness measurement possible
- Single channel rate and thickness monitor without unnecessary added features to compact size and minimize cost
- Ethernet communications for seamless integration
SQM-160은 입증된 INFICON 석영 크리스탈 센서 기술을 사용하여 박막 증착 공정의 속도와 두께를 측정합니다
- 2개의 측정 채널이 표준으로 제공되고 4개의 채널을 옵션으로 추가할 수 있음
- 속도/두께 기록을 위한 아날로그 출력
- 고해상도 옵션: 10개 판독값/초에서 0.03 Hz
- RS-232 표준, USB 또는 이더넷 옵션
STM-2는 USB 연결의 간편성을 정밀 측정 엔진의 정확도와 결합하여 작지만 비싸지 않은 패키지로 제공합니다
- 저렴한 기기
- USB 연결
- 내부 오실레이터
- 초당 10회 측정 시 높은 정확도
SemiQCM® SR sensor is one component of a system for precursor monitoring, with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).
- QCM data monitored at 10 Hz
- FabGuard correlates QCM data to tool state and process step
- Precise measurement of deposition or etch rates
- Sensitivity & precision for sub-monolayer thickness measurement
Real-time, in situ process monitoring to prevent over-etching and identify chamber clean endpoint
- QCM data monitored at 10 Hz
- FabGuard correlates QCM data to tool state and process step
- Precise measurement of deposition or etch rates
- Sensitivity & precision for sub-monolayer thickness measurement