Pasamuros y más
Terminales de paso de movimiento lineal CF
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
La gran variedad de terminales de paso de INFICON ofrece el dispositivo adecuado para todas las aplicaciones que se soliciten, independientemente de que se utilice, por ejemplo, en cámaras de aplicación de revestimiento o en su proyecto de investigación aplicada en condiciones de laboratorio.
Los diseños de brida disponibles ISO-KF / ISO-K y CF corresponden a nuestra línea de conectores. Todos los pasos se pueden utilizar en sistemas de vacío con velocidades de fuga de hasta 1 x 10-9 mbarl/s. También disponible para UHV y todos los pasos diseñados en metal.
Ventajas
- Con fuelle para las necesidades de vacío más exigentes
- Empuje directo y acción de tirar
- Ajuste de alta precisión con el tornillo micrométrico
- De conformidad con la normativa 2011/65/EU (RoHS)
Especificaciones
FPU016-H
FPU040-H
FPU016-Z
FPU040-Z
Type | FPU016-H | |
Vacuum connection | DN 16 CF-R | |
Feedthrough/seal | bellow | |
Shaft connection | M4x16mm | |
Actuator | manual | |
Travel | mm | 25 |
Travel per revolution | mm | |
Scale division | mm | 5 |
Shaft load | ||
Radial force at max. | N | 20 |
Axial force vacuum | N | 85 |
Axial force against atm | N | 100 |
Torsion torque | N•m | 0.2 |
Tightness | mbar•L/s | 5 x 10-11 |
Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
Bakeout temperature | ||
Feedtrough | °C | 300 |
Micrometer screw | °C | |
Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
Weight | kg | 0.15 |
Vacuum connection | DN 40 CF-R | |
Feedthrough/seal | bellow | |
Shaft connection | M6x10mm, Ø10mm | |
Actuator | manual | |
Travel | mm | 50 |
Travel per revolution | mm | |
Scale division | mm | 10 |
Shaft load | ||
Radial force at max. | N | 100 |
Axial force vacuum | N | 140 |
Axial force against atm | N | 200 |
Torsion torque | N•m | 0.5 |
Tightness | mbar•L/s | 5 x 10-11 |
Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
Bakeout temperature | ||
Feedtrough | °C | 300 |
Micrometer screw | °C | |
Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
Weight | kg | 0.75 |
Vacuum connection | DN 16 CF-R | |
Feedthrough/seal | bellow | |
Shaft connection | M4x16mm | |
Actuator | micrometer screw | |
Travel | mm | 20 |
Travel per revolution | mm | 0.5 |
Scale division | mm | 0.01 |
Shaft load | ||
Radial force at max. | N | 20 |
Axial force vacuum | N | 185 |
Axial force against atm | N | 200 |
Torsion torque | N•m | 0.2 |
Tightness | mbar•L/s | 5 x 10-11 |
Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
Bakeout temperature | ||
Feedtrough | °C | 300 |
Micrometer screw | °C | 100 |
Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
Weight | kg | 0.25 |
Vacuum connection | DN 40 CF-R | |
Feedthrough/seal | bellow | |
Shaft connection | M6x10mm, Ø10mm | |
Actuator | micrometer screw | |
Travel | mm | 50 |
Travel per revolution | mm | 1 |
Scale division | mm | 0.005 |
Shaft load | ||
Radial force at max. | N | 100 |
Axial force vacuum | N | 440 |
Axial force against atm | N | 500 |
Torsion torque | N•m | 0.5 |
Tightness | mbar•L/s | 5 x 10-11 |
Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
Bakeout temperature | ||
Feedtrough | °C | 300 |
Micrometer screw | °C | 100 |
Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
Weight | kg | 1 |
Número de parte
FPU016-H | |
214-330 | FPU016-H Linear feedthrough DN 16 CF-R |
FPU016-Z | |
214-334 | FPU016-Z Linear feedthrough DN 16 CF-R |
FPU040-H | |
214-332 | FPU040-H Linear feedthrough DN 40 CF-R |
FPU040-Z | |
214-336 | FPU040-Z Linear feedthrough DN 40 CF-R |