Pasamuros y más
Paso de movimiento lineal/giratorio ISO-KF
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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La gran variedad de terminales de paso de INFICON ofrece el dispositivo adecuado para todas las aplicaciones que se soliciten, independientemente de que se utilice, por ejemplo, en cámaras de aplicación de revestimiento o en su proyecto de investigación aplicada en condiciones de laboratorio.
Los diseños de brida disponibles ISO-KF / ISO-K y CF corresponden a nuestra línea de conectores. Todos los pasos se pueden utilizar en sistemas de vacío con velocidades de fuga de hasta 1 x 10-9 mbarl/s. También disponible para UHV y todos los pasos diseñados en metal.
Ventajas
- Dos juntas de ejes FPM
- Actuación giratoria y balanceo directo
- Con anillo de retención y dispositivo antirrotación opcional
- De conformidad con la normativa 2011/65/EU (RoHS)
Especificaciones
FCH016-H
FCH025-H
FCH040-H
| Vacuum connection | DN 16 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 3 / Ø5mm | |
| Travel | mm | 50 |
| Shaft load | ||
| Radial force at max.travel | N | 10 |
| Torsion torque | N•m | 2 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.1 |
| Vacuum connection | DN 25 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 4 / Ø8mm | |
| Travel | mm | 100 |
| Shaft load | ||
| Radial force at max.travel | N | 15 |
| Torsion torque | N•m | 8 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.2 |
| Vacuum connection | DN 40 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 6 / Ø12mm | |
| Travel | mm | 150 |
| Shaft load | ||
| Radial force at max.travel | N | 30 |
| Torsion torque | N•m | 20 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.3 |
Número de parte
| FCH016-H | |
| 214-320 | FCH016-H Rotary/linear motion feedthroug |
| 214-072 | Anti-rotation device DN 16 |
| FCH025-H | |
| 214-322 | FCH025-H Rotary/linear motion feedthroug |
| 214-073 | Anti-rotation device DN 25 |
| 214-349 | FCH025-H Rotary/linear motion feedthroug |
| FCH040-H | |
| 214-324 | FCH040-H Rotary/linear motion feedthroug |
| 214-074 | Anti-rotation device DN 4 |
