RF Sensor with FabGuard® Integration Software Provides Real-time Plasma Process Analysis to Significantly Reduce Process Variability

yracuse, NY - 20 September 2005: INFICON introduces RF sensor technology which provides highly accurate, multi-variate RF data on actual plasma conditions of both process development and production process problems to significantly reduce process variability. The latest in its suite of advanced process control in situ sensors, this non-intrusive, RF sensor combines with FabGuard Sensor Integration and Analysis System to offer critical diagnostic information, e.g. accurate and repeatable chamber clean and process endpoint, root cause analysis of faults (such as plasma arcing), and process fingerprinting for chamber matching in PVD, CVD and etch applications.

INFICON RF sensor technology with FabGuard generates highly accurate models that predict wafer metrology results by measuring and performing analysis on fundamental and harmonic voltages and currents, so engineers have the ability to control actual wafer results on every wafer processed. Now FabGuard one-of-a-kind, powerful algorithm capability combines with RF sensor technology to significantly improve repeatability, stability, and accuracy of semiconductor processes, based on real-time measurements and correlation delivered through an easy-to-interpret user interface.

For more information, contact INFICON, Two Technology Place, East Syracuse, NY 13057-9714, +1.315.434.1100, email: reachus@inficon.com, http://www.inficon.com

INFICON is a leading developer, manufacturer and supplier of innovative instrumentation, critical sensor technologies, and advanced process control software for the semiconductor and vacuum-coating industries and other industrial applications. These analyses, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media and precision optics. INFICON also provides toxic chemical analysis for the emergency response and security markets and essential instrumentation for gas leak detection to the air conditioning/refrigeration industries. Headquartered in Syracuse, New York, INFICON has world-class manufacturing facilities in the United States and Europe and worldwide offices in the U.S., China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom. INFICON is a publicly listed company, registered with the Swiss Stock Exchange (SWX). For more information about INFICON and its products, please visit the Company's website at www.inficon.com.

RF Sensor with FabGuard® Integration Software Provides Real-time Plasma Process Analysis to Significantly Reduce Process Variability
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