ProMOS Technologies Selects INFICON Fabguard Sensor Integration And Analysis System As Part Of Its Advanced Process Control Initiative

Syracuse, New York/Zurich, Switzerland ? March 18, 2002 ? INFICON Holding AG (SWX Swiss Exchange and NASDAQ: IFCN), a leading manufacturer of vacuum instrumentation and critical sensor technologies for the semiconductor and related industries and other industrial applications, has received an order from ProMOS Technology, Inc. for its FabGuard Sensor Integration and Analysis System. ProMOS Technology, a leading memory chip producer based in Taiwan, is utilizing the INFICON FabGuard system as part of its sensor-based advanced process control initiative. FabGuard was chosen for its technically superior sensors, software capability, and semiconductor process and equipment expertise.

The INFICON FabGuard Sensor Integration and Analysis System is an early fault detection analysis system providing real-time, on-line diagnostics of semiconductor tool performance. It delivers substantial process improvements and cost advantages to chip manufacturers. High value chips and the escalating process complexity to manufacture them are driving semiconductor manufacturers to adopt advanced process control and early fault detection. Advanced process control provides the required immediate feedback on the manufacturing process and the product. FabGuard, part of the INFICON in situ analysis solution, is a critical component of a fab's advanced process control initiative.

"ProMOS Technology's selection of the INFICON FabGuard Sensor Integration and Analysis System is another example of the growing demand for advanced process controls and early fault detection among 300mm foundries," said James Brissenden, chief executive officer of INFICON. "These Asia-Pacific based foundries are becoming an increasing factor in semiconductor chip manufacturing. To quickly adapt their manufacturing to a rapidly changing mix of products, they require the most up-to-date advanced process control. In FabGuard, we offer foundries a technically superior solution. We expect an accelerating adoption of FabGuard as the advanced process control market expands."

INFICON is a leading manufacturer of vacuum instrumentation and critical sensor technologies for the semiconductor and related industries. These analysis, measurement and control products are used in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media and precision optics. INFICON also sells innovative instruments to the air conditioning/refrigeration, emergency response and industrial hygiene markets. Headquartered in Syracuse, New York, INFICON has manufacturing facilities in the United States and Europe and worldwide offices in the U.S., China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom. For more information about INFICON and its products, please visit the Company's website at

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