INFICON Unveils UL5000 Helium Leak Detector at SEMICON West 2003

Featuring I-CAL and Hydro-S for fastest, accurate leak-checking of semiconductor and flat panel display manufacturing equipment

Syracuse, NY - 23 June 2003: INFICON Holding AG (SWX Swiss Exchange and NASDAQ: IFCN), a leading provider of vacuum instrumentation, critical sensor technologies, and process control software for analysis, measurement and control of semiconductor and other advanced processes, will introduce the newest in its extensive line of market-leading leak detectors at SEMICON West, July 14-16, San Francisco, with the INFICON UL5000 Helium Leak Detector. Featuring INFICON proprietary software algorithms I-CAL and Hydro-S in a field-proven vacuum design, the UL5000 provides testing flexibility, high sensitivity, and extremely fast response leak testing results in the low minimum sensitivity ranges.

Designed for high efficiency and speed in the OEM and fab environment for testing components, subassemblies, large chambers or semiconductor tools, the UL5000 pumps down quickly and gives fast, accurate, repeatable results down to the 10 -12 atm cc/s leak rate range. While conventional leak detectors must average the signal over long periods of time to ensure a stable leak rate, the UL5000 with I-CAL responds with unparalleled speed and stability in all measurement ranges, including the smallest minimum leak rate ranges. For decreasing time to test, HYDRO-S eliminates the water vapor contribution from the helium peak, so testing can begin sooner.

The UL5000 uses the INFICON market-leading magnetic sector mass spectrometer, combined with a highly effective vacuum system. A special turbomolecular pump of optimized pumping speed and compression with a large, rugged roughing pump ensures the UL5000 quickly reaches leak rate levels below the rejection point, so testing may begin quickly. A booster turbomolecular pump on the inlet ensures rapid response to leaks small and large, even on the largest volumes and chambers.

The UL5000 features a convenient work surface, rotatable display with wide-angle viewing, and optional remote handpiece for control and display.

For more information, contact INFICON, Two Technology Place, East Syracuse, NY 13057-9714, +1.315.434.1100, email:,

INFICON is a leading developer, manufacturer and supplier of innovative vacuum instrumentation, critical sensor technologies, and advanced process control software for the semiconductor and related industries. These analysis, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media and precision optics. INFICON also provides essential instrumentation for gas leak detection and toxic chemical analysis to the air conditioning/refrigeration, emergency response and industrial hygiene markets. Headquartered in Syracuse, New York, INFICON has manufacturing facilities in the United States and Europe and worldwide offices in the U.S., China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom. For more information about INFICON and its products, please visit the Company's website at

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