INFICON Transpector MPH Residual Gas Analyzer at SEMICON West Unparalled Performance for Increased Yields and Maximum Uptime

Syracuse, NY­ — July 9, 2013:  The INFICON Transpector MPH Gas Analysis System is designed to “unlock your process” with industry leading performance for gas analysis applications to help maximize chip yields and minimize tool downtime. INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed  (1 ms measurement time), minimum detectable partial pressure (<5E-15 Torr) and increased signal-to-noise ratio.


Transpector MPH is optimized for both common semiconductor RGA applications (like leak checking and contamination detection) and more demanding applications that are unavailable to other RGAs (Interwafer Monitoring, Photoresist). The unparalleled speed and sensitivity improve the quality and statistical validity of the RGA data, which increases the accuracy of Fault Detection Classification and other process control metrics.




INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process control software that enhance productivity and quality in sophisticated industrial vacuum processes. These analysis, measurement and control products are essential for gas leak detection in air conditioning/refrigeration and automotive manufacturing.  They are vital to equipment manufacturers and end-users in the complex fabrication of semiconductors and thin film coatings for optics, flat panel displays, solar cells and industrial vacuum coating applications. Other users of our vacuum-based processes include the life sciences, research, aerospace, packaging, heat treatment, laser cutting and many other industrial processes. We also leverage our expertise in vacuum technology to provide unique, toxic chemical analysis products for emergency response, security, and environmental monitoring.  INFICON is headquartered in Switzerland and has world-class manufacturing facilities in Europe, the United States and China, as well as subsidiaries in China, Finland, France, Germany, India, Italy, Japan, Korea, Liechtenstein, Singapore, Sweden, Switzerland, Taiwan, the United Kingdom and the United States. INFICON registered shares (IFCN) are listed on the SIX Swiss Exchange. For more information about INFICON and its products, please visit

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