Optimizing Solar and LCD Process Yield by Monitoring Gas Pressures,Detecting Contaminants and Locating Leaks
Syracuse, NY - July 8, 2008: INFICON will showcase its new Transpector® XPR3L Gas Analysis System
, used for PVD process monitoring to gain real-time data on process gas pressures, gas ratios, contamination levels, impurities and leaks, at this year's Intersolar North America, July 15 - 17 in San Francisco. Transpector XPR3L provides dual-purpose functionality, process monitoring and base vacuum assurance by operating from ultra-high vacuum (UHV) up to 10 mTorr (20 mTorr optional).
Transpector XPR3L improves process yield, reduces scrap, and improves product quality through continuous and automatic monitoring of process gas partial pressures and gas ratios, as well as detecting and identifying possible contaminants. Transpector XPR3L operates across a 1 to 100 amu mass range, protecting the investment and reducing risk by providing the ability to detect a broad range of materials, contaminants or by products.
Transpector XPR3L is compatible with Tware32 process characterization software to facilitate gas analyzer control, data collection and display. The system is also compatible with FabGuard, the suite of software products to provide reliable advanced diagnostics and process control.
For more information, contact INFICON, Two Technology Place, East Syracuse, NY 13057-9714, +1.315.434.1100, email: firstname.lastname@example.org
INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process control software that enhance the productivity and quality of sophisticated vacuum processes in highly specialized markets. These analysis, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex fabrication of semiconductors and thin film coatings for flat panel displays, solar cells, magnetic and optical storage media, scientific and consumer optics, and architectural glass coatings. They are essential for gas leak detection in air conditioning/refrigeration/automotive manufacturing. Other industrial users of our vacuum technology include the life sciences, research, aerospace, food packaging, heat treating, sterilization, and laser cutting. We also leverage our expertise in vacuum technology to provide unique, toxic chemical analysis products for emergency response, security, and environmental monitoring. INFICON has world-class manufacturing facilities in the United States and Europe and subsidiaries in China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, the United Kingdom and the United States. INFICON registered shares (IFCN) are listed on the SWX Swiss Stock Exchange. For more information about INFICON and its products, please visit www.inficon.com