INFICON Introduces First Multi-Sensor e-Diagnostics For Semiconductor Manufacturing At SEMICON West 2001

- eFabGuard Global Support Network allows INFICON experts to assist fab engineers in solving process, equipment, and sensor problems to improve productivity -

INFICON Holding AG, (SWX Swiss Exchange and Nasdaq: IFCN), a leading developer, supplier, and manufacturer of vacuum instrumentation for the semiconductor and related markets, today announced that it will introduce eFabGuard Global Support Network, the first multi-sensor e-diagnostics using INFICON sensor and process experts for immediate analysis and troubleshooting of semiconductor process and equipment problems, anywhere at anytime, at SEMICON West 2001, San Francisco (Booth 926, South Hall, Moscone Center). eFabGuard is an extension of the INFICON FabGuard Sensor Integration and Analysis System which provides a comprehensive view of process conditions.

"The INFICON implementation of e-diagnostics goes far beyond the common industry interpretation," said James L. Brissenden, president and chief executive officer of INFICON Holding AG. "While eFabGuard will certainly allow INFICON to monitor and troubleshoot our own equipment, it is uniquely positioned through FabGuard capability and various in situ diagnostic sensors to also monitor actual process conditions. We can see what others can't --- the net output of all process parameters. With eFabGuard, you can have the collective experience of INFICON experts through a secure online connection at every tool protecting every wafer," continued Mr. Brissenden.

INFICON has a substantial installed base in 200mm fabs. This year, INFICON has worked with major semiconductor equipment manufacturers and has successfully installed FabGuard Sensor Integration and Analysis Systems on 300mm PVD tools at major semiconductor end-user facilities. FabGuard has successfully demonstrated a reduction in the number of lost product wafers due to photoresist contamination from upstream processes. INFICON is the industry's leading supplier of such photoresist detection systems.

"But this is no longer about simply detecting residual photoresist on wafers entering PVD cluster tools," Mr. Brissenden further commented. "Valuable as that may be, FabGuard is a versatile applications kit for virtually any process tool. Uncovering elusive mechanisms for device failure and pathways for continuous process improvement has become a way of life for INFICON. It's all about closing the loop. Once a particular problem is understood, FabGuard can be trained to detect it in the future."

Companies with multiple facilities can use eFabGuard to more readily share information during process development and technology transfer. "For example, quite often two tools running the same recipe side by side will yield different results. FabGuard accounts for and helps correct these differences. Imagine now that two tools can be matched even if they are separated by thousands of miles," explained Mr. Brissenden.

The semiconductor industry has sought greater in situ sensor utilization to keep wafer processing tools operating at optimum performance levels; FabGuard makes this practical by automating sensor operation, by providing a powerful set of analysis tools, and now by making INFICON experts available via eFabGuard to collaborate with our customers to solve real problems, anywhere, anytime.

INFICON is a leading developer, manufacturer and supplier of vacuum instrumentation used for analysis, monitoring, measurement and control by manufacturers to improve the productivity of their production processes and the quality of their products. INFICON sells its products to customers worldwide, with a particular focus on semiconductor and related markets such as manufacturers of semiconductor chips, flat screen televisions and monitors, computer disc drive components and various electronic storage media, such as compact discs, digital video discs and floppy discs.

With global headquarters in Syracuse, New York, INFICON is a publicly traded company in Switzerland on the SWX Swiss Exchange and in the U.S. on the Nasdaq National Market under the symbol IFCN. The Company has manufacturing facilities in the United States and Europe with worldwide offices and service centers in the U.S. China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom, For more information about INFICON and its products, please visit the Company's web site at

This press release contains forward-looking statements that address, among other things, our strategic objectives, trends in the industries in which we operate and the anticipated effects of these trends on our business. These forward-looking statements are based on the current plans and expectations of our management and are subject to a number of uncertainties and risks that could significantly affect our current plans and expectations, as well as future results of operations and financial condition. Some of these risks and uncertainties are discussed in our filings with the Securities and Exchange Commission.

As a consequence, our current and anticipated plans and our future prospects, results of operations and financial condition may differ from those expressed in any forward-looking statements made by or on behalf of our company. We undertake no obligation to publicly update or revise any forward-looking statements, whether as a result of new information, future events or otherwise.

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