Non-intrusive clamp-on RF sensor delivers high-speed arc detection in CVD and Etch applications, reducing wafer loss and improving yields
Syracuse, NY — June 8, 2007: The INFICON Sion™ Plasma Arc Detector
provides real-time, high-power analyses of plasma micro-arcing which can cause damage to the target, the film being deposited, and even the wafer surface in chemical vapor deposition (CVD) and ETCH processes. More compact than any other device on the market, the plasma arc detector employs the INFICON FabGuard® Integration and Analysis System to detect arcs that were previously un-detectable. The result is reduced waste, improved yields – and profitability.
The Sion Plasma Arc Detector’s performance isn’t hampered as are inline cable mount sensors; it doesn’t change the tool’s RF delivery system characteristics. The non-intrusive clamp-on design provides an extremely compact, non-intrusive sensor to connect directly to the process chamber’s high-power RF delivery system to collect voltage and current information at speeds up to 20KHz. This includes a high-speed signal converter connecting directly to the FabGuard data collection and analysis system.
Other devices cannot compete with the performance of the INFICON Plasma Arc Detector, because large RF sensors must be squeezed into locations, which allow only inadequate arc detection.
For more information, contact INFICON, Two Technology Place, East Syracuse, NY 13057-9714, +1.315.434.1100, email: firstname.lastname@example.org
INFICON is a leading developer, manufacturer and supplier of innovative instrumentation, critical sensor technologies, and advanced process control software for the semiconductor, vacuum coating, and general vacuum process industries. These analysis, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media and precision optics. INFICON also provides essential instrumentation for gas leak detection to the air conditioning/refrigeration industries and toxic chemical analysis for the emergency response and security markets. INFICON has world-class manufacturing facilities in the United States, Europe and China and worldwide offices in the U.S., China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan, and the United Kingdom. INFICON is a publicly listed company, registered with the Swiss Stock Exchange (SWX). For more information about INFICON and its products, please visit the Company's website at www.inficon.com