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Smart FDC & FPS Introduction
From sensor data to smart fab. How software turns process signals into actionable intelligence.
About the webinar
As semiconductor fabs evolve from point systems toward autonomous operations, the software layer connecting sensors to decisions becomes critical. This webinar introduces our Intelligent Manufacturing Systems solutions and shows how they fit into the smart fab roadmap.
You'll start with the Factory Productivity System (FPS), which goes beyond basic equipment states (E10) to deliver Enhanced Tool Performance (ETP) reporting, giving you a granular, real-time picture of what your tools are actually doing versus what traditional state models show. The session then covers FabGuard, our process control software for real-time sensor data collection and fault detection, and how it integrates with facilities and subfab monitoring to link tool states with energy consumption, predictive maintenance, and regulatory compliance.
The second half focuses on Smart FDC which is our AI/ML-enhanced fault detection and classification platform. You'll see how it uses deep learning to automatically generate process envelopes, how the "Teaching" function lets subject matter experts refine models directly in the UI, and how it reduces false anomaly rates to surface real excursions faster.
