1. SQC-310
沉积控制器

SQC-310

高精度顺序或共沉积控制

SQC-310

INFICON SQC-310 系列拥有先进的电子元件、改进的显示屏和非常实惠的价格，为您提供竞争对手薄膜控制器所不具备的功能。您可以选择适合您应用的理想型号：顺序沉积 (SQC-310) 或共沉积 (SQC-310C)。

功能

  • 明亮的彩色液晶显示屏 - 提供英文或中文显示
  • 标准RS-232和USB接口（可选RS-232和以太网接口）
  • 通过 "快速设置 "菜单、6个上下文敏感按钮和方便的参数设置旋钮，实现简单的设置和操作
  • Windows®程序，用于开发、测试和下载过程，并将仪表数据记录到PC上，用于过程分析和质量控制
  • 精确的过程控制，尤其适用于低沉积速率，分辨率为±0.03 Hz，读数为10个/秒
  • 可存储多达100个过程、1,000层、50层薄膜的数据
  • 使用单个传感器或多个传感器监测源材料，以提供精确的源分布监测

规格

SQC-310
SQC-310C
测量
QCM 输入QCM 输入2 (4 可选）
频率范围频率范围可调:
1.0 MHz 最低
6.5 MHz 最高
频率分率 (1)频率分率 (1)± 0.012 Hz
厚度和速率分辨率/测量 (2)厚度和速率分辨率/测量t (2)±0.015 Å
频率稳定频率稳定± 2 ppm 总, 0 to 50C
测量间隔测量间隔0.10 to 1.0 s (可调)
显示速率显示速率0.01 Å/sec
控制
储存储存100 过程, 1000 模层, 50 模系
控制输出控制输出2 (4 可选)
信号输出信号输出± 0 to 10 VDC, 15 bits
数字输入/继电器数字输入/继电器8/8 (16/16 可选)
数字输入数字输入5 VDC 非隔离
继电器继电器SPST 1A, 30V, 2A 最大
接口接口标准 RS-232 and USB (RS-232 和Ethernet 选项)
远程控制远程控制选项 (IPN 782-900-017)
# 
显示
类型类型1/4 VGA 320 x 240 有源矩阵彩色 LCD
图型图型速率、偏差、功率或全屏数字
一般
电源电源100-240 VAC, 50/60 Hz, 25W
兼容兼容 CE, RoHS
Windows® S软件Windows® 软件包含
机箱 / 安装机箱 / 安装5 1/4” 半机架
(1) 0.25 s测量间隔的分辨率
(2)工具/密度 = 100/1, 基础频率 = 6 MHz, 0.25 s 测量间隔
Measurement
QCM InputsQCM Inputs4
Measurement Frequency RangeMeasurement Frequency RangeAdjustable:
1.0 MHz minimum
6.5 MHz maximum
Frequency Resolution (1)Frequency Resolution (1)± 0.012 Hz
Thickness and rate resolution/measurement (2)Thickness and rate resolution/measurement (2)±0.015 Å
Frequency StabilityFrequency Stability± 2 ppm total, 0 to 50C
Measurement IntervalMeasurement Interval0.10 to 1.0 s (adjustable)
Rate DisplayRate Display0.01 Å/sec
Control
StorageStorage100 processes, 1000 layers, 50 films
Control OutputsControl Outputs4
Output SignalOutput Signal± 0 to 10 VDC, 15 bits
Digital Inputs/RelaysDigital Inputs/Relays16/16
Digital InputsDigital Inputs5 VDC non-isolated
RelaysRelaysSPST Form 1A, 30V, 2A max
Interface(s)Interface(s)Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power ControlRemote Power ControlOptional (IPN 782-900-017)
Display
TypeType1/4 VGA 320 x 240 active matrix color LCD
GraphsGraphsRate, deviation, power or full screen numeric
General
PowerPower100-240 VAC, 50/60 Hz, 25 W
ComplianceComplianceCE, RoHS
Windows® SoftwareWindows® SoftwareIncluded
Housing / MountingHousing / Mounting5 1/4” half-rack
(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval
附件
配件和备件
名称描述
Front Load Single SensorFront Load Single Sensor
Front Load Dual SensorFront Load Dual Sensor
Cool Drawer Single SensorCool Drawer Single Sensor
Cool Drawer Dual SensorCool Drawer Dual Sensor
Easy Rate Single SensorEasy Rate Single Sensor
Easy Rate Dual SensorEasy Rate Dual Sensor
UHV Bakeable SensorUHV Bakeable Sensor
Sputtering SensorSputtering Sensor
CrystalSix® SensorCrystalSix® Sensor
Crystal 12® SensorCrystal 12® Sensor
RSH-600 Rotary SensorRSH-600 Rotary Sensor
零件编号描述
782-900-007Full Rack Extender - Mounts one SQC-310 or Composer Elite in a 19 in. rack (includes blank-off)
782-900-016Rack adapter - mounts two SQC-310 instruments in 19 in. rack
782-502-097-G1Ethernet option card
782-502-096-G2USB option card
Oscillator kits(Includes oscillator and cables)
783-500-109-103 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-257.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-5015.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-7522.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
Oscillator Only(No cables included)
783-500-013-G1OSC-100 oscillator only (no cables)
Cables 
782-902-01115.2 cm (6 in.) BNC cable, male/female
782-902-012-103 m (10 ft.) BNC cable, male/male
782-902-012-257.6 m (25 ft.) BNC cable, male/male
782-902-012-5015.2 m (50 ft.) BNC cable, male/male
782-902-012-7522.8 m (75 ft.) BNC cable, male/male
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