传感器和馈入件

炫酷抽屉双传感器

Cool-Drawer-Dual-Sensor

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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炫酷抽屉双传感器设计用于在真空室中需要第二晶体的关键过程。拥有水冷浇铸不锈钢传感器壳体、两个炫酷抽屉晶体支架以及一个气动闸门,可以为坚固耐用的传感器头提供超高的备份晶体可靠性。腔室中没有同轴电缆,可以进行更纯净、更可靠的真空系统安装。

功能

  • 双晶体
  • 炫酷抽屉晶体支架
  • 无内部电缆
  • 晶体闸
  • 还提供:CF40 馈入装置和 2.54 cm (1 in.) 螺栓馈入装置
  • 在配有焊接式 CF40 法兰时可烘烤
  • 在配有压缩接头时可调长度
  • 焊接为客户指定长度的传感器/馈入装置组合

规格

冷却水Minimum water flow of 150 to 200 cm³/min using 1/8 in. O.D. tube, 30°C max. (Do not allow to freeze)
材料304 stainless steel, ceramic, beryllium nickel
1 in. 螺栓和压缩接头密封端接
温度Operational environment to 300° C with water cooling or 165° C without
在此下载完整的规格

零件编号

Accessories
Consumables
Part NumberDescription
750-420-G1Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors)
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals
零件编号

Spare Parts

Part NumberDescription
123259Cool Drawer Sensor Crystal Retainer
123261Cool Drawer sensor Drawer
123260Cool Drawer Sensor Drawer and Retainer Combo
147206-2* Bellows with 35 in. tube
147207Bellows and cover assembly (Includes all parts marked with *)
147401Shutter
147402Link
147403* Actuator
147406* Bellows support
147407* Bellows Cover
147408* Threaded shaft
147411Spacer
147424* Bellows tube
082-026# 2-56 Nut (part of heat shield assembly)
082-064* Lockwasher
084-205* #4-40 x 3/16 Phillips screw
800128#4 Lockwasher
800371Shoulder Screw
800372Washer
800416* 6-32 x 3/16 in. set screw
803313* Spring
123223-2Conduit brazed assembly - short pin
803102O-ring for 5 port adjustable feedthrough
803261Washer for 5 port adjustable feedthrough
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