传感器和馈入件

UHV 可烘烤传感器

UHV-Bakeable-Sensor

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON UHV 可烘烤晶体传感器拥有经实践检验的可靠性和耐用性,提供超越当前市场上的任何传感器头的最佳热稳定性。可烘烤传感器由 304 号不锈钢、钼、铬镍铁合金、镍和氧化铝材料制成,设计为可承受连续烘烤温度高达 450° C(仅适用于烘烤,实际沉积监控需要水流)。前装式设计允许在侧面插入空间不足的应用中轻松插入晶体支架。

功能

  • 高温铜焊和焊接结构
  • 烘烤温度高达 450℃
  • 晶体闸(选件)
  • 前装式晶体支架
  • 易于安装
  • CF40 馈入装置
  • 馈入件不需要铜焊或焊接
  • 焊接为客户指定长度的传感器/馈入装置组合

规格

Bakeable Sensor w/ Shutter
Bakeable Sensor w/out Shutter
最高温度400° C continuous (for bake only; water flow recommended for actual deposition monitoring)
晶体交换Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange.
水、空气和同轴管线0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
最高温度450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
晶体交换Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
水、空气和同轴管线0.125 in. (3 mm) O.D. water x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
在此下载完整的规格

附件

Accessories
Consumables
Part NumberDescription
750-420-G1Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors)
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals

Spare Parts

Part NumberDescription
007-007Retainer spring (for crystal holder)
007-064Ceramic retainer
007-094Clamping spring
007-095Handle
007-098Female Connector (includes ferrules and nut)
007-099Bakeable head contact
007-100Insulator for BNC
007-103Insulator for bakeable head contact
007-104BNC Body
007-147#4-40 X 3/8 screw
007-155Braze assy - 12 in. (30.5 cm)
007-156Braze assy - 20 in (50.8 cm)
007-157Braze assy - 30 in. (76.2 cm)
007-228#4-40 X 5/8 screw
007-267-P2Spreader bar
007-268-P1Shoulder washer
007-269-P1Shoulder washer
008-007CRYSTAL SNATCHER
059-0084VCR gasket
070-201#4 Split lockwasher
084-069-P1#4-40 x 3/16 screw
750-018-P3Split clamp
750-018-P5Split clamp
750-022-G5Bellows assembly - 12 in. (30.5 cm)
750-022-G6Bellows assembly - 20 in. (50.8 cm)
750-022-G7Bellows assembly - 30 in. (76.2 cm)
750-028-G5Braze assy with air line - 12 in. (30.5 cm)
750-028-G6Braze assy with air line - 20 in. (50.8 cm)
750-028-G7Braze assy with air line - 30 in. (76.2 cm)
750-115-P4Coupling (installs onto bellows assembly)
750-118-P4Actuator support
750-120-G3Shaft assembly
750-216-G1Shutter assembly (part of shutter module)
750-218-G1Cyrstal holder
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